Integrated thin film batteries on silicon integrated circuits
First Claim
Patent Images
1. A solid-state battery, comprising:
- a plurality of stacked thin film layers, wherein the solid-state battery is at least partially integrated within the stacked layers and has a thickness less than about 1 μ
m.
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Abstract
A solid-state battery including at least one thin film layer, and method for making same.
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Citations
57 Claims
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1. A solid-state battery, comprising:
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a plurality of stacked thin film layers, wherein the solid-state battery is at least partially integrated within the stacked layers and has a thickness less than about 1 μ
m. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for forming a solid-state battery, comprising the steps of:
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forming a plurality of thin film layers over a substrate; and
patterning the plurality of thin film layers to define the solid-state battery, wherein the solid-state battery has a thickness less than approximately 1 μ
m. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A solid-state battery, comprising:
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a plurality of stacked thin film layers, wherein the solid-state battery is at least partially integrated within the stacked thin film layers, the stacked thin film layers comprise an electrolyte layer and the electrolyte layer has a thickness of less than about 100 nm. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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45. A method for forming a solid state battery, comprising the steps of:
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forming a plurality of thin film layers over a substrate, and chemical mechanical polishing at least one of the thin film layers.
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46. A method for forming a solid-state battery, comprising the steps of:
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forming a plurality of thin film layers over a substrate; and
patterning the plurality of thin film layers to define the solid-state battery, the solid-state battery including an electrolyte layer, wherein the electrolyte layer has a thickness of less than about 100 nm. - View Dependent Claims (47, 48, 49, 50, 51, 52, 53, 54, 55, 56)
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57. A solid-state battery, comprising:
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a thin solid electrolyte layer, wherein the electrolyte layer comprises an initial state and an operative state, the electrolyte layer in the initial state is substantially free of ions, and ions conduct through the electrolyte layer in the operative state during operation of the battery.
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Specification