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Processing method and processing system

  • US 20040260420A1
  • Filed: 06/18/2004
  • Published: 12/23/2004
  • Est. Priority Date: 06/20/2003
  • Status: Abandoned Application
First Claim
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1. A method for processing a workpiece, comprising:

  • a processing step of performing predetermined processing for the workpiece;

    an unnecessary portion removal step of removing an unnecessary portion produced on a surface of the workpiece due to the predetermined processing; and

    a surface structure evaluation step of evaluating a surface structure of the workpiece from which the unnecessary portion has been removed by said unnecessary portion removal step.

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