Processing method and processing system
First Claim
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1. A method for processing a workpiece, comprising:
- a processing step of performing predetermined processing for the workpiece;
an unnecessary portion removal step of removing an unnecessary portion produced on a surface of the workpiece due to the predetermined processing; and
a surface structure evaluation step of evaluating a surface structure of the workpiece from which the unnecessary portion has been removed by said unnecessary portion removal step.
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Abstract
The present invention is a processing method including a processing step of performing predetermined processing for a workpiece; an unnecessary portion removal step of removing an unnecessary portion produced on a surface of the workpiece due to the predetermined processing; and a surface structure evaluation step of evaluating a surface structure of the workpiece from which the unnecessary portion has been removed by the unnecessary portion removal step.
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Citations
46 Claims
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1. A method for processing a workpiece, comprising:
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a processing step of performing predetermined processing for the workpiece;
an unnecessary portion removal step of removing an unnecessary portion produced on a surface of the workpiece due to the predetermined processing; and
a surface structure evaluation step of evaluating a surface structure of the workpiece from which the unnecessary portion has been removed by said unnecessary portion removal step. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for processing a workpiece, comprising:
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a processing step of performing predetermined processing for the workpiece;
an unnecessary portion removal step of removing an unnecessary portion produced on a surface of the workpiece due to the predetermined processing; and
a surface structure evaluation step of evaluating a first surface structure of the workpiece from which the unnecessary portion has been removed by said unnecessary portion removal step, wherein subsequent to said processing step of performing predetermined processing, said first surface structure evaluation step is performed, and if the evaluation in said first surface structure evaluation step is a failure, said unnecessary portion removal step is performed, and a second surface structure evaluation step is performed for the workpiece from which the unnecessary portion has been removed. - View Dependent Claims (10)
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11. A system for processing a workpiece, comprising:
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a processing apparatus for performing predetermined processing for the workpiece;
an unnecessary portion removal apparatus for removing an unnecessary portion produced on a surface of the workpiece for which the predetermined processing has been performed;
a surface structure evaluation apparatus for evaluating a surface structure of the workpiece from which the unnecessary portion has been removed by said unnecessary portion removal apparatus;
a carrier apparatus for carrying the workpiece into/out of each of said apparatuses; and
a control apparatus for controlling said processing apparatus, said unnecessary portion removal apparatus, said surface structure evaluation apparatus, and said carrier apparatus. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A system for processing a workpiece, comprising:
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a processing apparatus for performing predetermined processing for the workpiece and removing an unnecessary portion produced on a surface of the workpiece due to the predetermined processing;
a surface structure evaluation apparatus for evaluating a surface structure of the workpiece from which the unnecessary portion has been removed by said processing apparatus;
a carrier apparatus for carrying the workpiece into/out of each of said apparatuses; and
a control apparatus for controlling said processing apparatus, said surface structure evaluation apparatus, and said carrier apparatus. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28)
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29. A method for processing a workpiece, comprising:
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an etching step of performing an etching processing for the workpiece;
a surface structure measurement step of measuring using Scatterometry a dimension of a surface structure of the workpiece processed in said etching step; and
a step of comparing the dimension of the surface structure measured in said surface structure measurement step to a previously set permissible value and deciding continuation or suspension of the etching processing based on the comparison result. - View Dependent Claims (30, 31, 32)
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33. A system for processing a workpiece, comprising:
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an etching processing apparatus for performing an etching processing for the workpiece;
a surface structure measurement apparatus for measuring using Scatterometry a dimension of a surface structure of the workpiece for which the etching processing has been performed; and
a control apparatus for comparing the measured dimension of the surface structure to a previously set permissible value and deciding continuation or suspension of the etching processing in said etching processing apparatus based on the comparison result. - View Dependent Claims (34, 35, 36)
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37. A method for processing a workpiece, comprising:
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a surface structure measurement step of measuring using Scatterometry a dimension of a surface structure of the workpiece before an etching processing;
a processing condition setting step of setting a processing condition at the time of an etching processing based on the measurement result of the dimension of the surface structure so that the surface structure of the workpiece after the etching processing has a desired dimension; and
thereafter, an etching step of performing an etching processing for the workpiece under the set processing condition. - View Dependent Claims (38, 39, 40, 41)
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42. A system for processing a workpiece, comprising:
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an etching processing apparatus for performing an etching processing for the workpiece;
a surface structure measurement apparatus for measuring using Scatterometry a dimension of a surface structure of the workpiece before the etching processing; and
a control apparatus for setting a processing condition at the time of the etching processing based on the measurement result of the dimension of the surface structure so that the surface structure of the workpiece after the etching processing has a desired dimension. - View Dependent Claims (43, 44, 45, 46)
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Specification