System and method for in-situ flow verification and calibration
First Claim
1. A system for in-situ verification and calibration of flow control devices, comprising:
- a flow verification device;
a first network physical layer for connecting the flow control devices to the flow verification device; and
a second network physical layer connected to the flow verification device;
wherein a controller of the flow verification device is programmed to verify and, if necessary, calibrate the flow control devices over the first network physical layer based upon a single command provided through the second network physical layer.
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Abstract
A system and method for in-situ verification and calibration of flow control devices includes a first network physical layer connecting the flow control devices to a flow verification device. A controller of the flow verification device is programmed to communicate with each of the flow control devices through the first network physical layer, receive gas specific information and a transfer function from each of the flow control devices, and verify the flow of each flow control device. The controller of the flow verification device is further programmed to communicate with each of the flow control devices through the first network physical layer and, if necessary, calibrate the flow control devices. The verification and calibration of the flow control devices is preferably carried out based upon a single command provided through a tool controller connected to a second network physical layer connected to the flow control devices.
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Citations
20 Claims
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1. A system for in-situ verification and calibration of flow control devices, comprising:
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a flow verification device;
a first network physical layer for connecting the flow control devices to the flow verification device; and
a second network physical layer connected to the flow verification device;
wherein a controller of the flow verification device is programmed to verify and, if necessary, calibrate the flow control devices over the first network physical layer based upon a single command provided through the second network physical layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for in-situ verification and calibration of flow control devices, comprising:
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connecting a flow verification device to the flow control devices through a first network physical layer;
connecting a second network physical layer to the flow verification device; and
programming a controller of the flow verification device to verify and, if necessary, calibrate the flow control devices over the first network physical layer based upon a single command provided through the second network physical layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification