Fluidic nanotubes and devices

• US 20040262636A1
• Filed: 04/08/2004
• Published: 12/30/2004
• Est. Priority Date: 12/09/2002
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Yang, Peidong, Fan, Rong, Li, Deyu, He, Rongrui, Wu, Yiying, Goldberger, Joshua, Majumdar, Arun
• Granted Patent: US 7,355,216 B2
• Time in Patent Office: Days
• US Class Current: 257/200
• CPC Class Codes: B01L 2200/0631 Purification arrangements, e.g. solid phase extraction [SPE]
• CPC Class Codes: B01L 2200/0663 Stretching or orienting elongated molecules or particles
• CPC Class Codes: B01L 2300/12 Specific details about materials
• CPC Class Codes: B01L 2300/161 Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
• CPC Class Codes: B01L 3/502761 specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules investigating characteristics of particles G01N15/00
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C30B 25/02 Epitaxial-layer growth
• CPC Class Codes: C30B 29/602 Nanotubes
• CPC Class Codes: C30B 29/605 Products containing multiple oriented crystallites, e.g. columnar crystallites
• CPC Class Codes: C30B 33/00 After-treatment of single crystals or homogeneous polycrystalline material with defined structure C30B31/00 takes precedence
• CPC Class Codes: G01N 27/00 Investigating or analysing materials by the use of electric, electrochemical, or magnetic means G01N3/00 – G01N25/00 take precedence; measurement or testing of electric or magnetic variables or of electric or magnetic properties of materials G01R
• CPC Class Codes: H01L 21/0242 Crystalline insulating materials
• CPC Class Codes: H01L 21/02472 Oxides
• CPC Class Codes: H01L 21/02516 Crystal orientation
• CPC Class Codes: H01L 21/02521 Materials
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 21/02639 Preparation of substrate for selective deposition
• CPC Class Codes: H01L 21/02664 Aftertreatments planarisation in general H01L21/304
• CPC Class Codes: H01L 29/0676 : oriented perpendicular or at an angle to a substrate
• CPC Class Codes: H01L 29/068 : comprising a junction

Abstract

Fluidic nanotube devices are described in which a hydrophilic, non-carbon nanotube, has its ends fluidly coupled to reservoirs. Source and drain contacts are connected to opposing ends of the nanotube, or within each reservoir near the opening of the nanotube. The passage of molecular species can be sensed by measuring current flow (source-drain, ionic, or combination). The tube interior can be functionalized by joining binding molecules so that different molecular species can be sensed by detecting current changes. The nanotube may be a semiconductor, wherein a tubular transistor is formed. A gate electrode can be attached between source and drain to control current flow and ionic flow. By way of example an electrophoretic array embodiment is described, integrating MEMs switches. A variety of applications are described, such as: nanopores, nanocapillary devices, nanoelectrophoretic, DNA sequence detectors, immunosensors, thermoelectric devices, photonic devices, nanoscale fluidic bioseparators, imaging devices, and so forth.

Claims

1. A fluidic nanotube, comprising:

a tubular member having first and second ends, and an inner bore between said first and second ends;

said tubular member having a non-porous inner wall;

said tubular member comprising a non-carbon, hydrophilic material;

wherein said nanotube is a functional component of a device selected from the group of devices consisting essentially of nanocapillary devices, field effect transistors, nanoelectrophoretic devices, detectors, DNA sequence detectors, immunosensors, tube-field-effect transistors, microfluidic wafers, nanocapillary wafers, electrode wafers, MEMS switching chips, transistors, sensors, thermoelectric devices, photonic devices, nanoelectromechanical actuators, nanoelectromechanical sensors, nanoscale fluidic bioseparators, and imaging devices.

5. A nanotube as recited in claim 1, wherein said nanotube is formed by the steps comprising:

forming a core material;

depositing a nanotube material over said core material; and

removing said core material.

6. A nanotube as recited in claim 5, wherein said core material is sacrificed during said removal step.

7. A nanotube as recited in claim 5, wherein said core material comprises a sacrificial template for said nanotube.

8. A nanotube as recited in claim 5:

wherein said core material has ends and a side surface; and

wherein said nanotube material is deposited on said side surface to form a cylindrical sheath through which said core material extends.

9. A nanotube as recited in claim 5, wherein said core material is single-crystalline.

10. A nanotube as recited in claim 5, wherein said nanotube material is single-crystalline.

11. A nanotube as recited in claim 5, wherein said core material comprises a material selected from the group of materials consisting essentially of zinc oxide (ZnO), silicon (Si), gallium nitride (GaN), germanium (Ge), silver (Ag), gold (Au), group II-VI materials, group III-V materials, elemental group IV materials, and metals.

12. A nanotube as recited in claim 11, wherein said nanotube material comprises a material selected from the group of materials consisting essentially of GaN, Si, GaAs, CdSe, GaP, InP, Ge, InAs, Group II, III, IV, V, and VI materials including quaternaries and tertiaries, as well as oxides, SiO, GaO, InO and other insulating materials, elemental metals, and polymers.

13. A nanotube as recited in claim 12, wherein the material selected for said nanotube material has a sufficiently similar crystalline structure and lattice constant as the material selected for said core material to allow epitaxial growth of said nanotube material on said core material.

14. A nanotube as recited in claim 1, wherein said tubular member comprises a single longitudinal segment.

15. A nanotube as recited in claim 1, wherein said tubular member comprises multiple longitudinal segments.

2-4. -4 (canceled)

16-56. -56 (canceled)

57. A tubular field effect transistor (TFET), comprising:

at least one semiconducting nanotube;

a reservoir fluidly coupled to each end of said nanotube;

a source electrode attached to a first end of said nanotube; and

a drain electrode attached to a second end of said nanotube;

wherein the passage of molecular species through said nanotube changes source to drain current flow.

58. A transistor as recited in claim 57, further comprising capture molecules retained within said nanotube for capturing or slowing select molecular species.

59. A transistor as recited in claim 57, further comprising a gate electrode attached toward the center of said nanotube for controlling ion transport through said nanotube.

60. A transistor as recited in claim 57, wherein said tubular field effect transistor is a functional component of a device selected from the group of devices consisting essentially of nanocapillary devices, field effect transistors, nanoelectrophoretic devices, detectors, DNA sequence detectors, immunosensors, tube-field-effect transistors, sensors, thermoelectric devices, photonic devices, nanoelectromechanical actuators, nanoelectromechanical sensors, nanoscale fluidic bioseparators, and imaging devices.

61-68. -68 (canceled)

69. A nanocapillary electrophoresis device, comprising:

at least one hydrophilic nanotube;

a plurality of capture molecules retained within said nanotube for capturing or slowing selected molecular species;

a reservoir fluidly coupled to each end of said nanotube;

a source electrode coupled proximal a first end of said nanotube; and

a drain electrode coupled proximal a second end of said nanotube;

wherein the passage of molecular species through said nanotube changes ionic current flow.

70. A device as recited in claim 69, further comprising:

an optical single-molecule detection and identification system configured for generating an optical detection signal in response to molecules passing through said nanotube; and

a coincidence circuit configured to generate coincident molecule detection signal in response to the coincidence between said ionic current flow and said optical detection signal;

whereby the use of coincident detection increases false positive immunity.

71. A device as recited in claim 69, wherein said electrophoretic device is a functional component of a device selected from the group of devices consisting essentially of nanocapillary devices, nanoelectrophoretic devices, detectors, DNA sequence detectors, immunosensors, sensors, thermoelectric devices, photonic devices, nanoelectromechanical actuators, nanoelectromechanical sensors, nanoscale fluidic bioseparators, and imaging devices.

73. A device as recited in claim 71, wherein said electrophoretic device is a functional component of a device selected from the group of devices consisting essentially of nanocapillary devices, nanoelectrophoretic devices, detectors, DNA sequence detectors, immunosensors, sensors, thermoelectric devices, photonic devices, nanoelectromechanical actuators, nanoelectromechanical sensors, nanoscale fluidic bioseparators, and imaging devices.

74. A device as recited in claim 71, wherein said detecting means comprises:

a plurality of switching elements configured for selecting one or more of the electrophoresis cells in said array; and

a circuit for conditioning the signals received from each said electrophoresis cell.

75. A device as recited in claim 74, wherein said plurality of switching elements have a row and column arrangement for accessing cells within a two-dimensional array of said electrophoresis cells.

76. A device as recited in claim 74, wherein said switching elements have an off-state leakage current which is less than approximately 5 pA per 1 μ

m of gate length for V_ds≈

2.2 Volts.

77. A device as recited in claim 76, wherein each of said switching elements comprises a micro-electromechanical systems (MEMs) switch using switch contacts which are separated by an air-gap in the off-state and bridge the air-gap to establish a connection when in the on-state.

78. A device as recited in claim 77, wherein said MEMs switching elements comprises:

multiple signal contacts;

an activation contact; and

a flexible conductive beam configured for deflection toward said activation contact in response to an activation voltage potential, wherein during said deflection said flexible conductive beams makes contact with said multiple signal contacts establishing a conduction path between the multiple signal contacts.

79. A device as recited in claim 78, further comprising insulation disposed between said activation contact and said flexible conductive beam so that a conduction path is not established between said activation contact and said flexible conductive beam in response to deflection of said flexible conductive beam.

72. A nanocapillary electrophoresis array technology (NEAT) device, comprising:

a hydrophilic nanotube;

a plurality of capture molecules retained within said nanotube for capturing or slowing selected molecular species;

a reservoir fluidly coupled to each end of said nanotube;

a source electrode coupled proximal a first end of said nanotube;

a drain electrode coupled proximal a second end of said nanotube;

wherein the passage of molecular species through said nanotube changes ionic current flow;

wherein the above structures comprise an electrophoresis cell;

an array of said electrophoresis cells; and

means for detecting the current from each of said electrophoresis cells.

80-99. -99 (canceled)

100. A semiconductor device, comprising:

a nanotube formed from a plurality of longitudinal segments and sheaths of alternatively doped semiconductor material; and

a plurality of electrical contacts coupled to said alternatively doped longitudinal segments and/or sheaths for establishing electrical connection to said device.

101. A semiconductor device as recited in claim 100, wherein said semiconductor device is selected from the group of semiconductor devices consisting essentially of diodes, light emitters, light detectors, electron transport devices, bipolar transistors, FETs, insulated gate FETs, and combinations thereof.

102. A semiconductor device as recited in claim 100, wherein said alternatively doped longitudinal segments and sheaths are doped with different doping species and/or at different doping levels.

103. A semiconductor device as recited in claim 100, wherein at least two alternatively doped of said longitudinal segments and/or sheaths form a p-n or n-p junction.

104. A semiconductor device as recited in claim 100, wherein at said alternatively doped of said longitudinal segments and/or sheaths form a p-n-p or n-p-n junction.

105. A semiconductor device as recited in claim 100, further comprising an insulating segment or sheath between at least two said longitudinal segments and/or sheaths of alternatively doped semiconductor material.

106. A semiconductor device as recited in claim 105, wherein at least two of alternatively doped of said longitudinal segments and/or sheaths form a p-i, i-p, n-i, or i-n junction.

107. A semiconductor device as recited in claim 105, wherein alternatively doped of said longitudinal segments and/or sheaths form a p-i-n, n-i-p, n-i-n, or p-i-p junction.

108. A semiconductor device as recited in claim 100, wherein said longitudinal segments and sheaths of semiconductor material are formed about a nanowire core which is later removed.

109. A semiconductor device as recited in claim 100, wherein at least one said electrical contact is within the core of said longitudinal segments.