×

Solid state image pickup device

  • US 20040263657A1
  • Filed: 05/19/2004
  • Published: 12/30/2004
  • Est. Priority Date: 06/27/2003
  • Status: Active Grant
First Claim
Patent Images

1. A solid state image pickup device comprising:

  • a semiconductor substrate having a surface layer of a first conductivity type;

    a plurality of charge storage regions of a second conductivity type opposite to said first conductivity type disposed in said surface layer in a row and column matrix shape, constituting a plurality of photoelectric conversion elements;

    a plurality of vertical channels of the second conductivity type disposed in said surface layer adjacent to respective columns of said charge storage regions;

    vertical transfer electrodes formed above the semiconductor substrate, crossing said vertical channels, constituting vertical charge coupled devices;

    a horizontal channel of the second conductivity type disposed in said surface layer coupled to said vertical channels, having a first portion with a plurality of transfer stages, each including a barrier region and a well region, and a second portion constituting a gate region with gradually decreasing width, and including an upstream region and a downstream region of different effective impurity concentration, establishing a built-in potential;

    horizontal transfer electrodes disposed above respective transfer stages of said horizontal channel;

    an output gate electrode disposed above said gate region;

    a floating diffusion region of said second conductivity type disposed in said surface layer coupled to said gate region of said horizontal channel, constituting an output element for receiving a signal charge and outputting a voltage signal.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×