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Method of and preventing focal plane anomalies in the focal plane of a projection system

  • US 20040263811A1
  • Filed: 04/23/2004
  • Published: 12/30/2004
  • Est. Priority Date: 04/24/2003
  • Status: Active Grant
First Claim
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1. A method of decreasing focal plane anomalies of a focal plane of a projection system of a lithographic projection apparatus comprising:

  • exposing the projection system to an intense beam of radiation for a substantial period of time.

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