Dual-sided capacitor and method of formation
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Accused Products
Abstract
A dual-sided HSG capacitor and a method of fabrication are disclosed. A thin native oxide layer is formed between a doped polycrystalline layer and a layer of hemispherical grained polysilicon (HSG) as part of a dual-sided lower capacitor electrode. Prior to the dielectric formation, the lower capacitor electrode may be optionally annealed to improve capacitance.
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Citations
83 Claims
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1-50. -50. (Canceled)
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51. A method of forming a capacitor comprising:
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forming a hemispherical grained polysilicon layer over a substrate;
subjecting said hemispherical grained polysilicon layer to a cleaning solution to remove impurities from said hemispherical grained polysilicon layer and to obtain a cleaned hemispherical grained polysilicon layer;
forming a native oxide layer over said cleaned hemispherical grained polysilicon layer, said native oxide layer being formed to a thickness of about 5 Angstroms to about 50 Angstroms;
forming an amorphous silicon layer over said native oxide layer;
subjecting said amorphous silicon layer to a seeding treatment;
forming a dielectric layer over at least a portion of an outer side of said cleaned hemispherical grained polysilicon layer and said amorphous silicon layer; and
forming a conductive layer over said dielectric layer. - View Dependent Claims (52, 53, 54, 55, 56, 57, 58, 59)
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60. A method of forming a capacitor comprising:
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forming a hemispherical grained polysilicon layer over a substrate;
forming a native oxide layer over said hemispherical grained polysilicon layer by an in-situ atomic layer deposition employing a silicon source precursor and an oxygen source;
forming an amorphous silicon layer over said native oxide layer;
forming a dielectric layer over at least a portion of an outer side of said hemispherical grained polysilicon layer and said amorphous silicon layer; and
forming a conductive layer over said dielectric layer. - View Dependent Claims (61, 62, 63, 64)
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65. A method of forming a capacitor comprising:
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forming a hemispherical grained polysilicon layer over a substrate;
forming a native oxide layer over said hemispherical grained polysilicon layer by an ex-situ atomic layer deposition employing a silicon source precursor and an oxygen source;
forming an amorphous silicon layer over said native oxide layer;
forming a dielectric layer over at least a portion of an outer side of said hemispherical grained polysilicon layer and said amorphous silicon layer; and
forming a conductive layer over said dielectric layer. - View Dependent Claims (66, 67, 68, 69)
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70. A method of forming a capacitor comprising:
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forming a hemispherical grained polysilicon layer over a substrate;
forming a native oxide layer over said hemispherical grained polysilicon layer by thermal growth at a temperature of less than about 900°
C. for about 1 second to about 10 minutes;
forming an amorphous silicon layer over said native oxide layer;
forming a dielectric layer over at least a portion of an outer side of said hemispherical grained polysilicon layer and said amorphous silicon layer; and
forming a conductive layer over said dielectric layer. - View Dependent Claims (71, 72, 73, 74)
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75. A method of reducing the diffusivity of silicon atoms of a lower capacitor electrode, comprising:
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providing a doped polysilicon layer in an opening formed within a semiconductor substrate, said doped polysilicon layer comprising hemispherical grained polysilicon grains having a first thickness;
providing a native oxide layer over said doped polysilicon layer; and
providing a layer of hemispherical grained polysilicon over said native oxide layer, said layer of hemispherical grained polysilicon comprising grains of a second thickness, wherein said second thickness is greater than said first thickness. - View Dependent Claims (76, 77, 78, 79, 80, 81, 82, 83)
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Specification