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MEMS RF switch module including a vertical via

  • US 20040264152A1
  • Filed: 06/25/2003
  • Published: 12/30/2004
  • Est. Priority Date: 06/25/2003
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a Micro-electromechanical System (MEMS) module including at least one MEMS device;

    at least one contact mounted to a bottom of the MEMS module; and

    at least one via to pass vertically through a portion of the MEMS module to electrically couple the at least one MEMS device to the contact.

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