VCSEL having thermal management
First Claim
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1. A vertical cavity surface emitting laser (VCSEL) comprising:
- a substrate;
a first mirror situated on said substrate;
an active region situated on said first mirror;
a second mirror situated on said active region;
a first contact situated on a first portion of said second mirror;
a thermally conductive layer situated on a second portion of said second mirror; and
wherein said thermally conductive layer is thermally connected to said first contact.
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Abstract
A VCSEL structure having thermal management. The structure may be designed for conveyance of heat from the active layer primarily through one of the mirrors to a material that removes heat externally away from the structure. Thermal management may involve various configurations of heat removal for various VCSEL structures. The structures may be designed to effect such respective configurations for heat removal.
126 Citations
26 Claims
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1. A vertical cavity surface emitting laser (VCSEL) comprising:
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a substrate;
a first mirror situated on said substrate;
an active region situated on said first mirror;
a second mirror situated on said active region;
a first contact situated on a first portion of said second mirror;
a thermally conductive layer situated on a second portion of said second mirror; and
wherein said thermally conductive layer is thermally connected to said first contact. - View Dependent Claims (2, 3)
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4. A VCSEL comprising:
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a top mirror; and
a thermally conductive cover on said top mirror. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11)
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12. A VCSEL comprising:
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a substrate;
a first mirror situated on said substrate;
an active region situated on said first mirror;
a second mirror situated on said active region;
a contact situated on a first portion of said first mirror;
a low thermal conductive covering situated on a second portion of said first mirror; and
a thermally conductive material connected to said contact. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. A VCSEL comprising:
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a substrate;
a first semiconductor mirror situated on said substrate;
an active region situated on said first semiconductor mirror;
a second semiconductor mirror situated on said active region;
a dielectric mirror situated on said second semiconductor mirror;
a first contact situated on said first semiconductor mirror; and
a metal interconnect connected to said first contact and in contact with an edge of said dielectric mirror; and
wherein said dielectric mirror comprises thermally conductive material.
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21. A VCSEL comprising:
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a substrate;
a first mirror situated on said substrate;
an active region situated on said first mirror;
a second mirror situated on said active region; and
a thermally conductive material in contact with an edge of said second mirror. - View Dependent Claims (22, 23, 24, 25, 26)
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Specification