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REMOVAL OF RELATIVELY UNIMPORTANT SHAPES FROM A SET OF SHAPES

  • US 20040268290A1
  • Filed: 06/24/2003
  • Published: 12/30/2004
  • Est. Priority Date: 06/24/2003
  • Status: Active Grant
First Claim
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1. A method for reducing a number of shapes, said method comprising the steps of:

  • forming a first shape pattern;

    forming a second shape pattern, said second shape pattern including the first shape pattern and error shapes;

    extracting the error shapes from the second shape pattern;

    deriving from a subset of the error shapes at least one environment shape corresponding to each error shape in the subset of the error shapes, said environment shape reflecting a local geometric environment of its corresponding error shape; and

    deleting a subset of the environment shapes such that only unique environment shapes satisfying a selection criterion remain.

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  • 6 Assignments
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