Showerhead assembly and apparatus for manufacturing semiconductor device having the same

• US 20050000430A1
• Filed: 05/24/2004
• Published: 01/06/2005
• Est. Priority Date: 05/22/2003
• Status: Abandoned Application

• Current Assignee: Jusung Engineering Company Limited
• Original Assignee: Jusung Engineering Company Limited
• Inventors: Jang, Geun-Ha, Yu, Chi-Wook
• Application Number:
  US10/852,929
• Publication Number:
  US 20050000430A1
• Time in Patent Office: Days
• US Class Current: 118/715
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/4557 Heated nozzles
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 37/3244 Gas supply means

Abstract

A showerhead assembly of an apparatus for manufacturing a semiconductor device includes a backing plate having a gas inlet, a showerhead combined with the backing plate at an end portion thereof, wherein the showerhead has a plurality of holes, and a sub heater equipped at a peripheral portion of the showerhead.

Claims

1. A showerhead assembly of an apparatus for manufacturing a semiconductor device, comprising:

a backing plate having a gas inlet;

a showerhead combined with the backing plate at an end portion thereof, the showerhead having a plurality of holes; and

a sub heater equipped at a peripheral portion of the showerhead.

2. The showerhead assembly according to claim 1, wherein the sub heater passes through the backing plate.

3. The showerhead assembly according to claim 1, wherein the sub heater includes a heating line, a first shield enclosing the heating line, and a second shield surrounding the first sheath.

4. The showerhead assembly according to claim 3, wherein each of the first and second shields are composed of an insulating core and a metal sheath.

5. The showerhead assembly according to claim 4, wherein the insulating core includes magnesium oxide (MgO).

6. The showerhead assembly according to claim 4, wherein the metal sheath of the first shield may be formed of stainless steel.

7. The showerhead assembly according to claim 4, wherein the metal sheath of the second shield may be formed of aluminum.

8. The showerhead assembly according to claim 3, wherein the first shield is shorter than the heating line and the second shield is shorter than the first shield.

9. The showerhead assembly according to claim 1, wherein the end portion of the showerhead is thinner than a portion in which the plurality of holes are formed.

10. The showerhead assembly according to claim 9, wherein the showerhead includes a concavity between the end portion and the plurality of holes.

11. An apparatus for manufacturing a semiconductor device, comprising:

a chamber;

a susceptor in the chamber to hold a substrate thereon;

a showerhead assembly providing gas to the chamber, the showerhead assembly including;

a backing plate having a gas inlet;

a showerhead combined with the backing plate at an end portion thereof, the showerhead having a plurality of holes; and

a sub heater equipped at a peripheral portion of the showerhead; and

a pumping system controlling inner pressure of the chamber.

12. The showerhead assembly according to claim 11, wherein the sub heater passes through the backing plate and a lid of the chamber.

13. The showerhead assembly according to claim 11, wherein the sub heater includes a heating line, a first shield and a second shield, the first shield encloses the heating line, the second shield surrounds the first sheath.

14. The showerhead assembly according to claim 13, wherein each of the first and second shields are composed of an insulating core and a metal sheath.

15. The showerhead assembly according to claim 14, wherein the insulating core includes magnesium oxide (MgO).

16. The showerhead assembly according to claim 14, wherein the metal sheath of the first shield may be formed of stainless steel.

17. The showerhead assembly according to claim 14, wherein the metal sheath of the second shield may be formed of aluminum.

18. The showerhead assembly according to claim 11, wherein the end portion of the showerhead is thinner than a portion in which the plurality of holes are formed.

19. The showerhead assembly according to claim 18, wherein the showerhead includes a concavity between the end portion and the plurality of holes.