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Showerhead assembly and apparatus for manufacturing semiconductor device having the same

  • US 20050000430A1
  • Filed: 05/24/2004
  • Published: 01/06/2005
  • Est. Priority Date: 05/22/2003
  • Status: Abandoned Application
First Claim
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1. A showerhead assembly of an apparatus for manufacturing a semiconductor device, comprising:

  • a backing plate having a gas inlet;

    a showerhead combined with the backing plate at an end portion thereof, the showerhead having a plurality of holes; and

    a sub heater equipped at a peripheral portion of the showerhead.

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