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Apparatus for atmospheric pressure reactive atom plasma processing for surface modification

  • US 20050000656A1
  • Filed: 06/15/2004
  • Published: 01/06/2005
  • Est. Priority Date: 01/30/2001
  • Status: Abandoned Application
First Claim
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1. A tool for processing a surface of a workpiece, comprising:

  • a plasma processing chamber in which the workpiece can be positioned;

    a plasma torch included in the processing chamber, wherein the plasma torch is operable to perform a plurality of operations to process the surface of the workpiece using reactive atom plasma processing; and

    a translator operable to translate at least one of the workpiece and the plasma torch.

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