Semiconductor mechanical sensor
First Claim
1. A rotational angular velocity sensor comprising:
- a substrate;
a weight being located above said substrate and movably disposed via at least one beam;
a first electrode connected to said weight, wherein the weight, beam and first electrode are formed of common semiconductor material one another;
a second electrode facing said first electrode via insulation to form capacitance between the second and first electrodes, wherein the second electrode is formed of the same semiconductor material as that of the first electrode; and
wherein said first electrode and second electrode are arranged in a first direction and in parallel with the surface of said substrate, the widths of the first and second electrodes extend in a second direction which is in parallel with the surface of the said substrate and perpendicular to said first direction, and said first electrode is movable in said second direction, the movement of said first electrode induces change in said capacitance, the change thereof corresponds to the rotational angular velocity to be detected.
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Abstract
A semiconductor mechanical sensor having a new structure in which a S/N ratio is improved. In the central portion of a silicon substrate 1, a recess portion 2 is formed which includes a beam structure. A weight is formed at the tip of the beam, and in the bottom surface of the weight in the bottom surface of the recess portion 2 facing the same, an electrode 5 is formed. An alternating current electric power is applied between the weight portion 4 and the electrode 5 so that static electricity is created and the weight is excited by the static electricity. In an axial direction which is perpendicular to the direction of the excitation of the weight, an electrode 6 is disposed to face one surface of the weight and a wall surface of the substrate which faces the same. A change in a capacitance between the facing electrodes is electrically detected, and therefore, a change in a physical force acting in the same direction is detected.
45 Citations
12 Claims
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1. A rotational angular velocity sensor comprising:
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a substrate;
a weight being located above said substrate and movably disposed via at least one beam;
a first electrode connected to said weight, wherein the weight, beam and first electrode are formed of common semiconductor material one another;
a second electrode facing said first electrode via insulation to form capacitance between the second and first electrodes, wherein the second electrode is formed of the same semiconductor material as that of the first electrode; and
wherein said first electrode and second electrode are arranged in a first direction and in parallel with the surface of said substrate, the widths of the first and second electrodes extend in a second direction which is in parallel with the surface of the said substrate and perpendicular to said first direction, and said first electrode is movable in said second direction, the movement of said first electrode induces change in said capacitance, the change thereof corresponds to the rotational angular velocity to be detected. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A rotational angular velocity sensor comprising:
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a substrate;
a weight being located above said substrate and movably disposed via at least one beam;
an oscillation unit for oscillating said weight;
a first electrode connected to said weight, wherein the weight, beam and first electrode are formed of common semiconductor material one another;
a second electrode facing said first electrode via insulation to form capacitance between the second and first electrodes, wherein the second electrode is formed of the same semiconductor material as that of the first electrode; and
wherein said first electrode and second electrode are arranged in a first direction and in parallel with the surface of said substrate, the widths of the first and second electrodes extend in a second direction which is in parallel with the surface of said substrate and perpendicular to said first direction, and said first electrode is movable in said second direction due to the oscillation of said weight by said oscillation unit, the movement of said first electrode induces change in said capacitance, the change thereof corresponds to the rotational angular velocity to be detected. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification