Apparatus for forming a film and an electroluminescence device

• US 20050005848A1
• Filed: 04/19/2004
• Published: 01/13/2005
• Est. Priority Date: 04/25/2003
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kuwabara, Hideaki, Yamazaki, Shunpei
• Granted Patent: US 8,034,182 B2
• Time in Patent Office: Days
• US Class Current: 118/719
• CPC Class Codes: C23C 14/12 Organic material
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: H05B 33/10 Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
• CPC Class Codes: H10K 2102/3031 Two-side emission, e.g. transparent OLEDs [TOLED]
• CPC Class Codes: H10K 50/8426 Peripheral sealing arrangements, e.g. adhesives, sealants
• CPC Class Codes: H10K 50/8445 multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/164 using vacuum deposition

Abstract

A device having three evaporation sources and a unit for moving the respective evaporation sources in one chamber is used, whereby it becomes possible to increase efficiency of use of an evaporation material. Consequently, manufacturing cost can be reduced, and a uniform thickness can be obtained over an entire surface of a substrate even in the case in which a large area substrate is used.

Claims

1. An apparatus for forming a film comprising:

a load chamber;

a conveyance chamber connected to the load chamber; and

a film formation chamber connected to the conveyance chamber,

wherein the film formation chamber comprises a first evaporation source, means that moves the first evaporation source, a second evaporation source, means that moves the second evaporation source, a third evaporation source, and means that moves the third evaporation source.

2. The apparatus for forming the film according to claim 1,

wherein an installation chamber is connected to the film formation chamber, and

wherein the installation chamber is connected to evacuating and exhausting means that evacuates the installation chamber and has a mechanism for setting an evaporation material in the first, second, and third evaporation sources in the installation chamber.

3. The apparatus for forming the film according to claim 1,

wherein the film formation chamber is connected to an evacuation and exhaust treatment chamber that evacuates the film forming chamber and has means for introducing at least one of a material gas and a cleaning gas.

4. The apparatus for forming the film according to claim 1,

wherein the first, second, and third evaporation sources are movable in an X direction, a Y direction, and a Z direction in the film formation chamber.

5. The apparatus for forming the film according to claim 1,

wherein the film formation chamber has a shutter that sections the film formation chamber and shields evaporation to the substrate.

6. The apparatus for forming the film according to claim 1,

wherein a sealing chamber is connected to the conveyance chamber, and

wherein the sealing chamber is connected to evacuating and exhausting means, which evacuates the sealing chamber, and has a mechanism for applying a seal material with an ink jet method in the sealing chamber.

7. An apparatus for forming a film comprising;

a load chamber;

a conveyance chamber connected to the load chambers; and

a film formation chamber connected to the conveyance chamber,

wherein the film formation chamber comprises an aligning means that aligns a mask and a substrate, a first evaporation source, means that moves the first evaporation source, a second evaporation source, means that moves the second evaporation source, a third evaporation source, and means that moves the third evaporation source.

8. The apparatus for forming the film according to claim 7,

wherein an installation chamber is connected to the film formation chamber, and

wherein the installation chamber is connected to evacuating and exhausting means that evacuates the installation chamber and has a mechanism for setting an evaporation material in the first, second, and third evaporation sources in the installation chamber.

9. The apparatus for forming the film according to claim 7,

wherein the film formation chamber is connected to an evacuation and exhaust treatment chamber that evacuates the film forming chamber and has means for introducing at least one of a material gas and a cleaning gas.

10. The apparatus for forming the film according to claim 7,

wherein the first, second, and third evaporation sources are movable in an X direction, a Y direction, and a Z direction in the film formation chamber.

11. The apparatus for forming the film according to claim 7,

wherein the film formation chamber has a shutter that sections the film formation chamber and shields evaporation to the substrate.

12. (Currently Amended) The apparatus for forming the film according to claim 7,

wherein a sealing chamber is connected to the conveyance chamber, and

wherein the sealing chamber is connected to evacuating and exhausting means, which evacuates the sealing chamber, and has a mechanism for applying a seal material with an ink jet method in the sealing chamber.

13. An apparatus for forming a film comprising;

a load chamber,

a conveyance chamber connected to the load chamber, and

a film formation chamber connected to the conveyance chamber,

wherein the film formation chamber comprises a first evaporation source, means that moves the first evaporation source, a second evaporation source, means that moves the second evaporation source, a third evaporation source, and means that moves the third evaporation source, and

wherein the first, second third evaporation sources have containers with elliptical openings.

14. The apparatus for forming the film according to claim 13,

wherein an installation chamber is connected to the film formation chamber, and

wherein the installation chamber is connected to evacuating and exhausting means that evacuates the installation chamber and has a mechanism for setting an evaporation material in the first, second, and third evaporation sources in the installation chamber.

15. The apparatus for forming the film according to claim 13,

wherein the film formation chamber is connected to an evacuation and exhaust treatment chamber that evacuates the film forming chamber and has means for introducing at least one of a material gas of and a cleaning gas.

16. The apparatus for forming the film according to claim 13,

wherein the first, second, and third evaporation sources are movable in an X direction, a Y direction, and a Z direction in the film formation chamber.

17. The apparatus for forming the film according to claim 13,

wherein the film formation chamber has a shutter that sections the film formation chamber and shields evaporation to the substrate.

18. The apparatus for forming the film according to claim 13,

wherein a sealing chamber is connected to the conveyance chamber, and

wherein the sealing chamber is connected to evacuating and exhausting means, which evacuates the sealing chamber, and has a mechanism for applying a seal material with an ink jet method in the sealing chamber.

19. An apparatus for forming a film comprising;

a load chamber,

a conveyance chamber connected to the load chamber, and

a film formation chamber connected to the conveyance chamber,

wherein the film formation chamber comprises a first evaporation source, means that moves the first evaporation source, a second evaporation source, means that moves the second evaporation source, a third evaporation source, and means that moves the third evaporation source, and

wherein the first, second third evaporation sources have containers with inclined openings.

20. The apparatus for forming the film according to claim 19,

wherein an installation chamber is connected to the film formation chamber, and

wherein the installation chamber is connected to evacuating and exhausting means that evacuates the installation chamber and has a mechanism for setting an evaporation material in the first, second, and third evaporation sources in the installation chamber.

21. The apparatus for forming the film according to claim 19,

wherein the film formation chamber is connected to an evacuation and exhaust treatment chamber that evacuates the film forming chamber and has means for introducing at least one of a material gas of and a cleaning gas.

22. The apparatus for forming the film according to claim 19,

wherein the first, second, and third evaporation sources are movable in an X direction, a Y direction, and a Z direction in the film formation chamber.

23. The apparatus for forming the film according to claim 19,

wherein the film formation chamber has a shutter that sections the film formation chamber and shields evaporation to the substrate.

24. The apparatus for forming the film according to claim 19,

wherein a sealing chamber is connected to the conveyance chamber, and

wherein the sealing chamber is connected to evacuating and exhausting means, which evacuates the sealing chamber, and has a mechanism for applying a seal material with an ink jet method in the sealing chamber.

25. A container for forming a film containing an organic compound by evaporation,

wherein the container has an elliptical opening.

26. The container according to claim 25,

wherein the container has a prism shape.

27. A container for forming a film containing an organic compound by evaporation,

wherein the container has an inclined opening.

28. The container according to claim 27,

wherein the container has a prism shape.