Sensor element
First Claim
Patent Images
1. A sensor element, comprising:
- at least one heater structure;
at least one first circuit trace via which a current is injected into the heater structure;
at least one second circuit trace via which the current is coupled out of the heater structure; and
an arrangement for detecting resistances of individual sections of the heater structure, wherein the arrangement for detecting the resistances include additional, high-resistance measuring lines by which a voltage is tapped directly at the individual sections of the heater structure.
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Abstract
A sensor element has at least one heater structure, at least one first circuit trace being provided via which current is injected into the heater structure; at least one second circuit trace being provided via which the current is coupled out of the heater structure, and an arrangement for detecting the resistances of individual sections of the heater structure. According to the present invention, the arrangement for detecting the resistances includes additional, high-resistance measuring lines by which the voltage is tapped directly at the individual segments of the heater structure.
12 Citations
12 Claims
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1. A sensor element, comprising:
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at least one heater structure;
at least one first circuit trace via which a current is injected into the heater structure;
at least one second circuit trace via which the current is coupled out of the heater structure; and
an arrangement for detecting resistances of individual sections of the heater structure, wherein the arrangement for detecting the resistances include additional, high-resistance measuring lines by which a voltage is tapped directly at the individual sections of the heater structure. - View Dependent Claims (2, 3, 4, 5, 6, 8)
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- 7. The sensor as recited in claim 7, wherein the region includes a thin membrane having a poor thermal conductivity.
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11. A method of using a sensor element including at least one heater structure, at least one first circuit trace via which a current is injected into the heater structure, at least one second circuit trace via which the current is coupled out of the heater structure, and an arrangement for detecting resistances of individual sections of the heater structure, the arrangement for detecting the resistances including additional, high-resistance measuring lines by which a voltage is tapped directly at the individual sections of the heater structure, the method comprising:
causing the sensor element to detect a fluid flow. - View Dependent Claims (12)
Specification