Micromanupulator including piezoelectric benders

• US 20050006986A1
• Filed: 11/29/2002
• Published: 01/13/2005
• Est. Priority Date: 12/07/2001
• Status: Active Grant

• Current Assignee: Chip-Man Technologies Oy
• Original Assignee: Chip-Man Technologies Oy
• Inventors: Novotny, Marek, Kuncova, Johana, Zhou, Quan, Turunen, Juha, Ronkanen, Pekka, Kallio, Pasi, Koivo, Heikki
• Granted Patent: US 7,141,914 B2
• Time in Patent Office: Days
• US Class Current: 310/330
• CPC Class Codes: B25J 7/00 Micromanipulators specimen supports for investigating or analysing materials G01N23/2204; associated with microscopes G02B21/32; means for supporting or positioning the objects or the material in discharge tubes H01J37/20
• CPC Class Codes: H10N 30/2044 having multiple segments mechanically connected in series, e.g. zig-zag type
• CPC Class Codes: H10N 30/2046 adapted for multi-directional bending displacement

Abstract

The invention relates to a micromanipulator, which is intended for the positioning/localization of an operating instrument (1) coupled therewith, by controlling its movement in a single- or multi-axial system of coordinates, such as in the direction of an x-, y- and/or z-axis, by means of electrical actuators (2) present in the micromanipulator. Especially for providing a substantially elongated structure for the micromanipulator, one or more actuators (2; 2′) enabling the positioning/localization of the operating instruments (1), for providing at least one of its desired directions of motion, are implemented in the way of a piezoelectric bender (2′a).

Claims

1. A micromanipulator, which is intended for the positioning/localization of an operating instrument coupled therewith, by controlling its movement in a single- or multi-axial system of coordinates, such as in the direction of an x-, y- and/or z-axis, by means of electrical actuators present in the micromanipulator, whereby, especially for providing a substantially elongated structure for the micromanipulator, one or more actuators enabling the positioning/localization of the operating instrument, for providing at least one of its desired directions of motion, are implemented in the way of a piezoelectric bender, wherein the actuator, producing an axial direction of motion for the micromanipulator, is implemented in the way of a linear motor, and wherein the micromanipulator comprises at least two piezoelectric benders lying in essentially differing planes and that are coupled successively with each other and together with the linear motor on a common longitudinal axis.

2. A The micromanipulator according to claim 1, wherein the piezoelectric bender comprises any bi- or multimorph cantilever structure.

3. The micromanipulator according to claim 2, wherein the actuators, affecting at least two directions of motion for the micromanipulator, are implemented in the way of piezoelectric benders coupled successively with each other on a common longitudinal axis and lying in planes perpendicular to each other.

4. The micromanipulator according to claim 1, wherein actuator, affecting an axial direction of motion for the micromanipulator, is implemented in the way of a piezoelectric bender placed in a substantially crosswise direction relative to the longitudinal axis of the micromanipulator.

5. The micromanipulator according to claim 1, wherein the axially directed motion transmitted from a linear electric motor is adapted to be fine adjusted by means of a piezoelectric stack actuator.

6. The micromanipulator according to claim 5, wherein it comprises a direct-current electric motor based on rotating motion, such as a miniature DC-motor, which produces an axial motion linear to the voltage supplied therein.

7. The micromanipulator according to claim 1, wherein each piezoelectric bender included in the micromanipulator is provided with tracking elements, such as a strain gauge, particularly for obtaining feedback data regarding a movement of the discussed bender for enabling a continuous feedback control for the micromanipulator and/or for the like purpose.

8. The micromanipulator according to claim 1, which involves the use of at least one electric motor, wherein the actuators affecting two directions of motion for the micromanipulator are implemented in the way of longitudinally successive elements, including a direct-current electric motor, providing a rotation, and the piezoelectric bender, coupled behind it in the axial direction.

9. The micromanipulator according to claim 5, wherein the electric motor, such as a miniature DC-motor, is provided with tracking elements for monitoring the axial motion or the rotation transmitted therefrom, by means of a displacement or rotary sensor, such as an LVDT-, PSD-, opto-electric linear or rotary encoder, a Hall sensor and/or the like.

10. The micromanipulator according to claim 9, wherein the tracking elements monitoring the axially directed motion provided by the electric motor are placed on the substantially common longitudinal axis and on the opposite side of the electric motor relative to the operating instrument, the electric motor having its shaft disc fitted on the side opposite to the operating instrument with a slide bar assembly extending through a motor frame for a sensor subframe of the axially directed tracking elements.

11. The micromanipulator according to claim 1. wherein a control arrangement, included in the micromanipulator, intended particularly for improving the straightness and flatness of the axially directed motion produced by the micromanipulator, comprises an antifriction-bearing mounted slide assembly arranged in the substantially axial direction.

12. The micromanipulator according to claim 11, characterized in that between an end of the electric motor'"'"'s axially directed shaft and the stack actuator is provided at least a focusing means, such as a ball, for the controlled focusing on a spot contact principle of a force existing between the discussed

13. The micromanipulator according to claim 11, wherein the micromanipulator control arrangement comprises mechanical elastic members(s), such as one or more spring, elastic polymer, silicone absorbers and/or the like, particularly for eliminating the effects of inertial forces, friction, clearances and/or the like.

14. The micromanipulator according to claim 11, wherein the anti friction-bearing mounted slide assembly is implemented by means of an axial bearing provided with a ball bearing slide.

15. The micromanipulator according to claim 11, wherein the antifriction-bearing mounted slide assembly is implemented by means of an axial bearing provided with a crossed roller bearing.

16. The micromanipulator according to claim 1, wherein the electric motor included in the micromanipulator comprises a stepping or pulse motor.

17. The micromanipulator according to claim 1, wherein the motor included in the micromanipulator comprises e.g. a piezoelectric motor.

18. The micromanipulator as set forth in any of the preceding according to claim 1, wherein the motor included in the micromanipulator is manufactured from a magnetic shape memory material.