Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method
First Claim
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1. A spatial light modulator comprising an array of pixels disposed on a support, each pixel comprising:
- a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths;
an actuator arranged to move said movable mirror between the at least two positions;
a light sensitive element that receives a programming beam of a second wavelength and generates a control signal in response thereto; and
controller that controls said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element.
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Abstract
Each pixel of a spatial light modulator comprises a movable mirror, a light sensitive element and control circuitry to drive an actuator set the movable mirror to a state determined by a signal received by the light sensitive element.
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Citations
24 Claims
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1. A spatial light modulator comprising an array of pixels disposed on a support, each pixel comprising:
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a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths;
an actuator arranged to move said movable mirror between the at least two positions;
a light sensitive element that receives a programming beam of a second wavelength and generates a control signal in response thereto; and
controller that controls said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of spatially modulating a radiation beam according to a pattern using a spatial light modulator comprising an array of pixels disposed on a support, comprising:
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(a) modulating at least one programming beam according to the pattern;
(b) scanning the at least one programming beam across the array of pixels in synchronism with step (a), so as to irradiate a light sensitive element in the array of pixels, thereby setting a state of a moveable mirror corresponding to the light sensitive element; and
(c) directing the radiation beam onto the spatial light modulator so that the radiation beam is modulated according to the states of the movable mirror. - View Dependent Claims (13)
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14. A lithographic projection apparatus, comprising:
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an illumination system for providing a projection beam of radiation;
a programmable patterning device including a spatial light modulator having an array of pixels disposed on a support, the programming patterning device patterning the projection beam;
a projection system for projecting the patterned beam onto a target portion of a support, wherein each pixel comprises;
a movable mirror that is movable between at least two positions in which an incident radiation beam of a first wavelength is reflected into, respectively, different return paths;
an actuator arranged to move said movable mirror between the at least two positions;
a light sensitive element that receives a programming beam of a second wavelength and generates a control signal in response thereto; and
controller that controls said actuator to set said movable mirror to a selected position according to the control signal generated by said light sensitive element. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification