Solid organometallic compound-filled container and filling method thereof

• US 20050008799A1
• Filed: 06/14/2004
• Published: 01/13/2005
• Est. Priority Date: 07/08/2003
• Status: Active Grant

• Current Assignee: Tosoh Finechem Corporation (Tosoh Corporation)
• Original Assignee: Tosoh Finechem Corporation (Tosoh Corporation)
• Inventors: Haga, Kenichi, Tomiyasu, Shizuo, Tokudome, Kohichi
• Granted Patent: US 7,547,363 B2
• Time in Patent Office: Days
• US Class Current: 428/34.100
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
• CPC Class Codes: Y10T 428/13 Hollow or container type article [e.g., tube, vase, etc.]

Abstract

A novel filled container is provided, which can stably supply an apparatus for vapor phase epitaxial growth such as an MOCVD apparatus with a solid organometallic compound over a long term. The solid organometallic compound-filled container has a carrier gas inlet and a carrier gas outlet. The interior of the filled container is separated into a plurality of vertical compartments. A carrier gas introduced via the carrier gas inlet flows through each of the vertical compartments and is then discharged via the carrier gas outlet.

Claims

1. A solid organometallic compound-filled container having a carrier gas inlet and a carrier gas outlet, wherein

an interior of the filled container is separated into a plurality of vertical compartments, and

a carrier gas introduced via the carrier gas inlet flows through each of the vertical compartments and is then discharged via the carrier gas outlet.

6. A solid organometallic compound filling method, comprising the step of filling the solid organometallic compound-filled container according to claim 1 with a solid organometallic compound.

8. The solid organometallic compound-filled container according to claim 1, and wherein

the container further comprises carrier gas flow direction inverting means whereby the carrier gas introduced via the carrier gas inlet is directed to flow downward through each of the vertical compartments and is discharged via the carrier gas outlet.

9. The solid organometallic compound-filled container according to claim 8, wherein

(d) the interior of the filled container is separated by at least one partition in the vertical direction, whereby the interior of the filled container is separated into at least two compartments;

(e) the compartments formed in the filled container by separating the interior by the partition include a compartment having the carrier gas inlet and a compartment having the carrier gas outlet;

(f) the partition inside the filled container has a communicating channel with a lower opening and an upper opening that allows the carrier gas to flow from the carrier gas inlet through each of the compartments inside the filled container to the carrier gas outlet;

(g) in the communicating channel, the carrier gas introduced into the interior of the filled container is introduced via the lower opening and discharged via the upper opening of the communicating channel; and

(h) the filled container has a discharging channel having a lower opening for discharging the carrier gas from the lower part of the compartment having the carrier gas outlet via the carrier gas outlet.

10. The solid organometallic compound-filled container according to claim 9, wherein

in the communicating channel, the lower opening of the communicating channel is disposed at less than or equal to one third of the internal height of the container from the internal bottom of the filled container, the upper opening of the communicating channel is disposed at more than or equal to two third of the internal height of the container from the internal bottom of the filled container, and

in the discharging channel, the lower opening of the discharging channel is disposed at less than or equal to one third of the internal height of the container from the internal bottom of the filled container.

11. The solid organometallic compound-filled container according to claim 8, having a charging port for filling the compartment formed in the filled container by separating the interior by the partition with the solid organometallic compound.

12. The solid organometallic compound-filled container according to claim 8, wherein

the solid organometallic compound is trimethylindium.

13. A solid organometallic compound filling method, comprising the step of filling the solid organometallic compound-filled container according to claim 8 with a solid organometallic compound.

2. A solid organometallic compound-filled container, characterized in

that (a) an interior of the filled container is separated by at least one partition in a vertical direction, whereby the interior of the filled container is separated into at least two compartments;

that (b) the compartments formed in the filled container by separating the interior by the partition includes a compartment having a carrier gas inlet and a compartment having a carrier gas outlet; and

(c) the partition inside the filled container includes a partition having an opening that allows the carrier gas to flow from the carrier gas inlet through each of the compartments inside the filled container to the carrier gas outlet.

3. The solid organometallic compound-filled container according to claim 2, wherein

when the opening is disposed in a lower part of the partition, the opening is disposed at lower than or equal to one third of an internal height of the container from an internal bottom of the filled container, and

when the opening is disposed in an upper part of the partition, the opening is disposed at more than or equal to two third of the internal height of the container from the internal bottom of the filled container.

4. The solid organometallic compound-filled container according to claim 2, having a charging port for filling the solid organometallic compound into the compartment inside the filled container formed by separating the interior by the partition.

5. The solid organometallic compound-filled container according to claim 2, wherein

the solid organometallic compound is trimethylindium.

7. A solid organometallic compound filling method, comprising the step of filling the solid organometallic compound-filled container according to claim 2 with a solid organometallic compound.