Chemical sensor with oscillating cantilevered probe and mechanical stop
First Claim
1. A method of detecting a chemical species with an oscillating cantilevered probe, comprising:
- driving a cantilevered beam into oscillation with a drive mechanism coupled to the cantilevered beam;
tapping a free end of the oscillating cantilevered beam against a mechanical stop, the mechanical stop coupled to a base end of the cantilevered beam;
measuring a first amplitude of the oscillating cantilevered beam with a sense mechanism coupled to the cantilevered beam;
exposing a treated portion of the cantilevered beam to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species;
measuring a second amplitude of the oscillating cantilevered beam with the sense mechanism; and
determining the chemical species based on the first amplitude and the second amplitude.
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Accused Products
Abstract
The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.
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Citations
27 Claims
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1. A method of detecting a chemical species with an oscillating cantilevered probe, comprising:
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driving a cantilevered beam into oscillation with a drive mechanism coupled to the cantilevered beam;
tapping a free end of the oscillating cantilevered beam against a mechanical stop, the mechanical stop coupled to a base end of the cantilevered beam;
measuring a first amplitude of the oscillating cantilevered beam with a sense mechanism coupled to the cantilevered beam;
exposing a treated portion of the cantilevered beam to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species;
measuring a second amplitude of the oscillating cantilevered beam with the sense mechanism; and
determining the chemical species based on the first amplitude and the second amplitude. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A system for sensing a chemical species, comprising:
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a cantilevered beam including a treated portion;
a drive mechanism coupled to the cantilevered beam;
a sense mechanism coupled to the cantilevered beam; and
a mechanical stop coupled to a base end of the cantilevered beam;
wherein the cantilevered beam is driven into oscillation and tapped against the mechanical stop by the drive mechanism, and the chemical species is determined based on an oscillation amplitude measured by the sense mechanism when the treated portion of the cantilevered beam is exposed to the chemical species. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A handheld system for sensing a chemical species comprising:
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at least one cantilevered beam, wherein at least one cantilevered beam includes a treated portion;
a mechanical stop coupled to a base end of each cantilevered beam; and
a piezoelectric drive-sense mechanism coupled to each cantilevered beam;
wherein the chemical species is sensed based on an oscillation amplitude of each of the at least one cantilevered beams when the treated portion of at least one cantilevered beam is exposed to the chemical species. - View Dependent Claims (27)
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Specification