Data collection and diagnostic system for a semiconductor fabrication facility
First Claim
1. A method for gathering messages and failure codes in a system including a processing tool having a tool controller and a front end component having a front end component controller, the method comprising the steps of:
- (a) receiving the messages and failure codes from the front end component controller;
(b) filtering the messages and failure codes according to user defined criteria;
(c) storing the messages and failure codes filtered in said step (c) in a database; and
(d) presenting the messages and failure codes filtered in said step (c) over a network.
6 Assignments
0 Petitions
Accused Products
Abstract
The present invention provides a data collection and diagnostic system. The system, in one embodiment includes a data acquisition device that receives messages and alarm signals from each automation component controller. The system stores the messages and alarm signals received from each automation component controller and distributes the messages and alarm signals to a user—either locally or remotely. The system includes a configuration tool for selecting which messages and alarms signals are stored in a user accessible database. Multiple users may simultaneously access the information stored on the database or in real time over a network—either by a physical communication line or wirelessly.
-
Citations
20 Claims
-
1. A method for gathering messages and failure codes in a system including a processing tool having a tool controller and a front end component having a front end component controller, the method comprising the steps of:
-
(a) receiving the messages and failure codes from the front end component controller;
(b) filtering the messages and failure codes according to user defined criteria;
(c) storing the messages and failure codes filtered in said step (c) in a database; and
(d) presenting the messages and failure codes filtered in said step (c) over a network. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A data collection and diagnostic system, comprising:
-
a processing tool having a plurality of front end components, each one of said plurality of front end components having a component controller adapted to send messages and alarm signals relating to the operation of said front end component;
a tool controller electrically coupled to each one of said component controllers, said tool controller adapted to monitor some of said messages and alarm signals received form said component controllers;
a data acquisition device electrically coupled to said component controllers, said data acquisition device adapted to monitor all of said messages and alarm signals received from said component controllers, and including;
a processor adapted to filter said messages and alarm signals received from said component controllers;
a database adapted to store said messages and alarm signals filtered by said processor; and
a network interface; and
a central computer electrically coupled to said tool controller and said network interface by a network. - View Dependent Claims (16, 17, 18, 19)
-
-
20. A data collection and diagnostic system, comprising:
-
a processing tool having a plurality of front end components, each one of said plurality of front end components having a component controller adapted to send messages and alarm signals relating to the operation of said front end component;
a tool controller electrically coupled to each one of said component controllers, said tool controller adapted to monitor some of said messages and alarm signals received form said component controllers;
a data acquisition device electrically coupled to said component controllers, said data acquisition device adapted to monitor all of said messages and alarm signals received from said component controllers, and including;
a processor adapted to filter said messages and alarm signals received from said component controllers; and
a network interface;
a database adapted to store said messages and alarm signals filtered by said processor; and
a central computer electrically coupled to said tool controller, said network interface, and said database by a network.
-
Specification