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Method and apparatus for automated bi-directional integration of peripheral data sources for a production tool

  • US 20050010317A1
  • Filed: 07/11/2003
  • Published: 01/13/2005
  • Est. Priority Date: 07/11/2003
  • Status: Abandoned Application
First Claim
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1. A system for controlling a process, comprising:

  • a process tool;

    a process controller that controls the process tool;

    at least one sensor that senses a process parameter; and

    a data transmission network coupling the process controller and the at least one first sensor, wherein the process controller and the at least one sensor are configured as web servers to deliver data over the data transmission network.

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