Method and apparatus for automated bi-directional integration of peripheral data sources for a production tool

• US 20050010317A1
• Filed: 07/11/2003
• Published: 01/13/2005
• Est. Priority Date: 07/11/2003
• Status: Abandoned Application

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Robinson, Tim, Elliott, Brent, Schimunek, Bernhard, Rupp, Gerhard, Smith, John Alexander, Hadar, Ron, Attwood, Mark, Landesmann, Lior, Lev-Ami, Uzi
• Application Number:
  US10/617,138
• Publication Number:
  US 20050010317A1
• Time in Patent Office: Days
• US Class Current: 700/108
• CPC Class Codes: G05B 19/4185 characterised by the network communication
• CPC Class Codes: G05B 2219/32126 Hyperlink, access to program modules and to hardware modules in www, web server, browser
• CPC Class Codes: G05B 2219/34038 Web, http, ftp, internet, intranet server
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method and apparatus for automated bidirectional integration of peripheral data sources for a production tool couples the system components together in a web-based arrangement. The process tools and the peripheral data sources are configured as websites to provide information to the system. Certain components of the system are also configured as browsers to obtain available information and use this information to make decisions and perform actions.

Claims

1. A system for controlling a process, comprising:

a process tool;

a process controller that controls the process tool;

at least one sensor that senses a process parameter; and

a data transmission network coupling the process controller and the at least one first sensor, wherein the process controller and the at least one sensor are configured as web servers to deliver data over the data transmission network.

2. The system of claim 1, further comprising a database coupled to the data transmission network and is configured as a web server.

3. The system of claim 2, wherein the process controller and the at least one first sensor include web browsers for browsing the data transmission network for available data.

4. The system of claim 3, further comprising a fab controller coupled to the data transmission network, the fab controller configured as a web server and a web browser.

5. The system of claim 4, further comprising at least one second sensor that serves a process parameter, the second sensor configured only as a web server.

6. The system of claim 5, wherein at least one first sensor includes control functions responsive to available data obtained from browsing the data transmission network.

7. The system of claim 6, wherein the process tool is a semiconductor manufacturing tool.

8. A system comprising:

a production tool;

at least one peripheral data source at the production tool; and

a network to which the production tool and the at least one peripheral data source are coupled;

wherein the production tool and the at least one peripheral data source are configured for providing bi-directional flow of data over the network.

9. The system of claim 8, wherein the production tool and the at least one peripheral data source are each configured as a web server and a web browser.

10. The system of claim 9, further comprising a processor that correlates logistical production tool data with data from the at least one peripheral data source.

11. The system of claim 10, wherein the at least one peripheral data source is a first sensor for sensing the data and includes the processor.

12. The system of claim 11, wherein the processor comprises means for decision-making based on the correlated logistical production tool data and the sensed data.

13. The system of claim 12, further comprising production tool sensors coupled to the data transmission network and configured as a web server to provide sensoric data.

14. The system of claim 13, further comprising a database coupled to the data transmission network.

15. The system of claim 14, wherein a plurality of production tools and peripheral data sources are coupled to the data transmission network, and further comprising a system controller coupled to the data transmission network, the system controller providing control of the plurality of production tools.

16. The system of claim 15, wherein the plurality of production tools are semiconductor processing tools, and the database contains semiconductor process information.

17. The system of claim 16, wherein the first sensor includes means for performing an action in response to the means for decision-making.

18. A method of controlling a manufacturing process, comprising the steps:

sensing process parameter data at a process tool using a first sensor;

obtaining logistical tool data at the first sensor; and

performing an action at the first sensor based on the process parameter data and the logistical tool data.

19. The method of claim 18, wherein the first sensor is coupled to a data transmission network, and the step of obtaining logistical tool data includes the first sensor browsing the data transmission network for the logistical tool data.

20. The method of claim 19, further comprising correlating the process parameter data and the logistical tool data.

21. The method of claim 20, wherein the first sensor includes data processing capability and the step of sensing process parameter data includes obtaining sensoric data and processing the sensoric data to generate the process parameter data.

22. The method of claim 21, further comprising publishing the process parameter data on the data transmission network.

23. The method of claim 22, wherein a database and a process tool controller are coupled to the data transmission network, and further comprising publishing information at the database and the process tool controller, at least some of the information including the logistical tool data.

24. The method of claim 23, wherein the first sensor, the database and the process tool controller are configured as websites on the data transmission network.

25. The method of claim 24, further comprising a second sensor that generates sensoric data, the second sensor being configured as a website.

26. The method of claim 25, wherein the process tool is a semiconductor manufacturing process tool.