Method and apparatus for delivering process gas to a process chamber

• US 20050011447A1
• Filed: 07/13/2004
• Published: 01/20/2005
• Est. Priority Date: 07/14/2003
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Fink, Steven T.
• Application Number:
  US10/889,220
• Publication Number:
  US 20050011447A1
• Time in Patent Office: Days
• US Class Current: 118/715
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 37/3244 Gas supply means

Abstract

A gas delivery system for a plasma apparatus including a first plate having a gas inlet, and a second plate having a plurality of holes. The second plate is coupled to the first plate and spaced apart from the second to form a plenum chamber. A baffle honeycomb core is disposed between the first plate and the second plate in side the plenum chamber. The honeycomb core can be comprised of one or more spaced apart honeycomb panels. A surface of one of the honeycomb panels or a surface of the first panel can be contoured to control the pressure distribution of a gas in the plenum chamber. The gas delivery assembly for a plasma apparatus also includes a first plate having a gas inlet and a second plate coupled to the first plate to form a plenum chamber therebetween. The second plate includes a gas injection plate having a plurality of holes. The gas injection plate has a contoured surface such that a length of each of the plurality of holes varies depending on location of the holes on the contoured surface.

Claims

1. A gas delivery assembly for a plasma apparatus, comprising:

a first plate having a gas inlet;

a second plate having a plurality of holes, said second plate being coupled to said first plate and spaced apart from first said plate to form a plenum chamber; and

a baffle honeycomb core assembly disposed between said first plate and said second plate inside said plenum chamber.

2. A gas delivery assembly as recited in claim 1,

wherein said gas inlet supplies gas into said plenum chamber.

3. A gas delivery assembly as recited in claim 1,

wherein said gas inlet opens into various portions of said plenum chamber.

4. A gas delivery assembly as recited in claim 1,

wherein said gas inlet supplies gas through a central opening in said first plate.

5. A gas delivery assembly as recited in claim 1,

wherein said gas inlet supplies gas through a plurality of openings in said first plate.

6. A gas delivery assembly as recited in claim 1,

wherein said gas inlet supplies process gas through an annular channel which opens to an outer portion of said baffle honeycomb core assembly.

7. A gas delivery assembly as recited in claim 1,

wherein said baffle honeycomb core assembly includes at least one honeycomb panel.

8. A gas delivery assembly as recited in claim 7,

wherein said honeycomb panel comprises a plurality of cells.

9. A gas delivery assembly as recited in claim 8,

wherein said cells have varying sizes and said cells are arranged to control a distribution of gas pressure in said plenum chamber.

10. A gas delivery assembly as recited in claim 9,

wherein said cells are arranged such that cells with a smaller size are disposed in regions of said plenum chamber where gas pressure is higher and cells with larger size are disposed in regions of said plenum chamber where gas pressure is lower.

11. A gas delivery assembly as recited in claim 9,

wherein said sizes vary from smaller size at a central portion of said honeycomb panel to a larger size at the outer portion of said honeycomb panel.

12. A gas delivery assembly as recited in claim 7, further comprising attachments, wherein said at least one honeycomb panel is mounted to said first and second plates by using said attachments.

13. A gas delivery assembly as recited in claim 12,

wherein said attachments include at least one of a mounting ring, bonding, welding and fastening.

14. A gas delivery assembly as recited in claim 13,

wherein said attachments comprise said mounting ring, and said mounting ring comprises a structure cut out with a desired geometry to create a desired pressure distribution of the gas at an exit of said holes.

15. A gas delivery assembly as recited in claim 7, further comprising a plurality of plugs, wherein said plugs separate a plurality of honeycomb panels of said honeycomb core assembly, said plugs are configured and arranged to provide support for honeycomb panels in said plurality of honeycomb panels which are not rigid enough to support themselves.

16. A gas delivery assembly as recited in claim 1,

wherein said baffle honeycomb core comprises a plurality of spaced apart honeycomb panels forming a plurality of volume portions in said plenum chamber, and said gas inlet supplies gas through a plurality of openings in said first plate to each of said plurality of volume portions.

17. A gas delivery assembly as recited in claim 16,

wherein said plurality of honeycomb panels includes a first, a second and a third space apart honeycomb panels forming said plurality of volume portions in said plenum chamber,

said plurality of openings includes a central opening, a first lateral opening and a second lateral opening,

said central opening opens into and supplies gas to a volume in said plenum chamber between said first plate and said first honeycomb panel,

said first lateral opening opens into and supplies gas to a volume in said plenum chamber between said first honeycomb panel and said second honeycomb panel,

said second lateral opening opens into and supplies gas to a volume in said plenum chamber between said second honeycomb panel and said third honeycomb panel.

18. A gas delivery assembly as recited in claim 7,

wherein said at least one honeycomb panel comprises a contoured surface.

19. A gas delivery assembly as recited in claim 18,

wherein said contoured surface is such that said honeycomb panel is thicker in a central portion thereof and thinner in a lateral portion thereof.

20. A gas delivery assembly as recited in claim 19,

wherein said central portion is disposed in the vicinity of said gas inlet which supplies gas through a central opening in said first plate, and a pressure of the gas is higher in a vicinity of said central portion.

21. A gas delivery assembly as recited in claim 20,

wherein a pressure of a gas passing through said central portion is lowered more than the gas passing through said lateral portion.

22. A gas delivery assembly as recited in claim 21,

wherein a distribution of gas pressure after passage through said honeycomb panel is substantially uniform.

23. A gas delivery assembly as recited in claim 18,

wherein said contoured surface is such that said honeycomb panel is thinner in a central portion thereof and thicker in a lateral portion thereof.

24. A gas delivery assembly as recited in claim 23,

wherein said lateral portion is disposed in the vicinity of said gas inlet which supplies gas through a peripheral channel opening in said first plate, and a pressure of the gas is higher in a vicinity of said lateral portion.

25. A gas deliver assembly as recited in claim 24,

wherein a pressure of the gas passing through said lateral portion is lowered more than the gas passing through said central portion.

26. A gas delivery assembly as recited in claim 25,

wherein a distribution of gas pressure after passage through said honeycomb panel is substantially uniform.

27. A gas delivery assembly as recited in claim 1,

wherein said first plate has a contoured surface.

28. A gas delivery assembly as recited in claim 27,

wherein said contoured surface is convex towards said honeycomb core, and said gas inlet supplies gas through a central opening in said central portion of said first plate.

29. A gas delivery assembly as recited in claim 28,

wherein a gas pressure in a vicinity of said central opening is higher than a gas pressure in a vicinity of said peripheral portion.

30. A gas delivery assembly as recited in claim 27,

wherein said contoured surface is concave relative to said honeycomb core, and said gas inlet supplies gas through an annular channel in a periphery of said first plate.

31. A gas delivery assembly as recited in claim 28,

wherein a gas pressure in a vicinity of said peripheral portion is higher than a gas pressure in a vicinity of said central portion.

32. A gas delivery assembly as recited in claim 8,

wherein said at least one honeycomb panel is covered on at least one of its opposing surfaces with a layer, said layer comprising a plurality of holes, and said holes are disposed such that at least a portion of the plurality of holes are aligned with openings in said plurality of cells.

33. A gas delivery assembly as recited in claim 32,

wherein at least a portion of said plurality of cells comprise venting holes arranged to let gas flow laterally between said portion of said plurality of cells.

34. A gas delivery assembly as recited in claim 1,

wherein said second plate includes a gas showerhead injection plate and said plurality of holes are provided on said gas showerhead injection plate.

35. A gas delivery assembly as recited in claim 34,

wherein the holes in said gas showerhead injection plate are arranged to allow gas in said plenum chamber to exit the gas delivery assembly.

36. A gas delivery assembly as recited in claim 1,

wherein said gas delivery assembly is electrically connected to an RF power supply.

37. A gas delivery assembly as recited in claim 36,

wherein at least one of the first plate and the second plate is electrically connected to the RF power supply.

38. A plasma reactor comprising:

a vacuum chamber;

a chuck assembly;

a plasma source assembly; and

a gas delivery assembly including;

a first plate having a gas inlet;

a second plate having a plurality of holes, said second plate being coupled to said first plate and spaced apart from said first plate to form a plenum chamber; and

a baffle honeycomb core disposed between first plate and said second plate inside said plenum chamber.

39. A plasma reactor as recited in claim 38, wherein said plasma source assembly is a capacitively coupled plasma (CCP) source assembly.

40. A plasma reactor as recited in claim 39, wherein said capacitively coupled plasma (CCP) source assembly comprises and electrode assembly constructed and arranged adjacent to the chuck assembly, said electrode assembly and said chuck assembly defining a plasma region there between.

41. A plasma reactor as recited in claim 40,

wherein said electrode assembly includes said first plate and said second plate.

42. A plasma reactor as recited in claim 38, wherein said plasma source assembly is an inductively coupled plasma (ICP) source assembly.

43. A plasma reactor as recited in claim 38, wherein said plasma source assembly is an electrostatically shielded radio frequency (ESRF) plasma source assembly.

44. A plasma reactor as recited in claim 38, wherein the plasma source assembly is an helicon plasma source assembly.

45. A plasma reactor as recited in claim 38, wherein said plasma source assembly is an electron cyclotron resonance (ECR) source assembly.

46. A plasma reactor as recited in claim 38, wherein said gas inlet supplies a gas into said plenum chamber.

47. A plasma reactor as recited in claim 46, wherein said gas includes at least one of hydrogen-bromide, octafluorocyclobutane, fluorocarbon compounds, silane, tungsten-tetrachloride, and titanium-tetrachloride.

48. A gas delivery assembly for a plasma apparatus, comprising:

a first plate having a gas inlet;

a second plate coupled to said first plate to form a plenum chamber therebetween,

wherein said second plate includes a gas injection plate having a plurality of holes, and said gas injection plate has a contoured surface such that a length of each of said plurality of holes varies depending on a location of said holes on said contoured surface.

49. A gas delivery assembly as recited in claim 48,

wherein the holes in said gas injection plate are distributed on said contoured surface to allow a gas in said plenum chamber to exit the gas delivery assembly with a substantially uniform pressure distribution.

50. A gas delivery assembly as recited in claim 48,

wherein at least a portion of said plurality of holes includes any of a circular, elliptical or polygonal cross-section.

51. A gas delivery assembly as recited in claim 48,

wherein a size of each of said plurality of holes is selected depending on a location of said holes on said contoured surface.

52. A gas delivery assembly as recited in claim 48,

wherein said contoured surface is such that said gas injection plate is thicker in a central portion thereof and thinner in a peripheral portion thereof.

53. A gas delivery assembly as recited in claim 52,

wherein said central portion is disposed in a vicinity of said gas inlet which supplies gas through a central opening in said first plate, and a pressure of the gas is higher in a vicinity of said central portion.

54. A gas delivery assembly as recited in claim 53,

wherein a pressure of the gas passing through said central portion is lowered more than a pressure of the gas passing through said lateral portion.

55. A gas delivery assembly as recited in claim 54,

wherein a distribution of gas pressure after passage through said injection plate is substantially uniform.

56. A gas delivery assembly as recited in claim 48,

wherein said contoured surface is such that said injection plate is thinner in a central portion thereof and thicker in a lateral portion thereof.

57. A gas delivery assembly as recited in claim 56,

wherein said lateral portion is disposed in a vicinity of said gas inlet which supplies gas through a peripheral opening in said first plate, and a pressure of the gas is higher in a vicinity of said lateral portion.

58. A gas delivery assembly as recited in claim 57,

wherein a pressure of the gas passing through said lateral portion is lowered more than the gas passing through said central portion.

59. A gas delivery assembly as recited in claim 58,

wherein a distribution of gas pressure after passage through said injection plate is substantially uniform.

60. A gas delivery assembly as recited in claim 48,

wherein said contoured surface is such that said injection plate is thinner in a central and a lateral portions thereof and thicker in a portion located between said central portion and said lateral portion.

61. A gas delivery assembly as recited in claim 60,

wherein said portion located between said central and said lateral portions is disposed in a vicinity of said gas inlet which supplies gas through an opening in said first plate, and a pressure of the gas is higher in a vicinity of said portion located between said central and said lateral portions.

62. A gas delivery assembly as recited in claim 61,

wherein a pressure of the gas passing through said portion located between said central and said lateral portions is lowered more than the gas passing through said central and said lateral portions.

63. A gas delivery assembly as recited in claim 62,

wherein a distribution of gas pressure after passage through said injection plate is substantially uniform.

64. A gas delivery assembly as recited in claim 48,

wherein said contoured surface is such that said injection plate is thicker in a central and a lateral portions thereof and thinner in a portion located between said central portion and said lateral portion.

65. A gas delivery assembly as recited in claim 64,

wherein said central and said lateral portions are disposed in a vicinity of said gas inlet which supplies gas through central and lateral openings in said first plate, and a pressure of the gas is higher in a vicinity of said central and said lateral portions.

66. A gas delivery assembly as recited in claim 65,

wherein a pressure of the gas passing through said central and said lateral portions is lowered more than the gas passing through said portion located between said central and said lateral portions.

67. A gas delivery assembly as recited in claim 66,

wherein a distribution of gas pressure after passage through said injection plate is substantially uniform.

68. A gas delivery assembly as recited in claim 48,

wherein said gas inlet opens into various portions of said plenum chamber.

69. A gas delivery assembly as recited in claim 48,

wherein said gas inlet supplies gas through a plurality of openings in said first plate.

70. A gas delivery assembly as recited in claim 48, further comprising a gas baffle assembly disposed between said first plate and said second plate inside said plenum chamber.

71. A gas delivery assembly as recited in claim 70,

wherein said gas baffle assembly includes at least one baffle plate.

72. A gas delivery assembly as recited in claim 71,

wherein said baffle plate comprises a plurality of holes.

73. A gas delivery assembly as recited in claim 72,

wherein said plurality of holes in said baffle plate have varying sizes and said holes are arranged to control a distribution of gas pressure in said plenum chamber.

74. A gas delivery assembly as recited in claim 70,

wherein said gas baffle assembly includes at least one honeycomb panel.

75. A gas delivery assembly as recited in claim 74,

wherein said honeycomb panel comprises a plurality of cells.

76. A gas delivery assembly as recited in claim 75,

wherein said cells have varying sizes and said cells are arranged to control a distribution of gas pressure in said plenum chamber.

77. A gas delivery assembly as recited in claim 48,

wherein said gas delivery assembly is electrically connected to an RF power supply.

78. A gas delivery assembly as recited in claim 77,

wherein at least one of the first plate and the second plate is electrically connected to the RF power supply.

79. A plasma reactor comprising:

a vacuum chamber;

a chuck assembly disposed in said chamber;

a plasma source assembly disposed to create a plasma in said chamber; and

a gas delivery assembly disposed to introduce gas in said chamber, said gas delivery assembly including;

a first plate having a gas inlet;

a second plate coupled to said first plate to form a plenum chamber there between,

wherein said second plate includes a gas injection plate having a plurality of holes, and said gas injection plate has a contoured surface such that a length of each of said plurality of holes varies depending on location of said holes on said contoured surface.

80. A plasma reactor as recited in claim 79, wherein said plasma source assembly is a capacitively coupled plasma (CCP) source assembly.

81. A plasma reactor as recited in claim 80, wherein said capacitively coupled plasma (CCP) source assembly comprises an electrode assembly constructed and arranged adjacent to the chuck assembly, said electrode assembly and said chuck assembly defining a plasma region therebetween.

82. A plasma reactor as recited in claim 81,

wherein said electrode assembly includes said first plate and said second plate.

83. A plasma reactor as recited in claim 79, wherein said plasma source assembly is an inductively coupled plasma (ICP) source assembly.

84. A plasma reactor as recited in claim 79, wherein said plasma source assembly is an electrostatically shielded radio frequency (ESRF) plasma source assembly.

85. A plasma reactor as recited in claim 79, wherein said plasma source assembly is an helicon plasma source assembly.

86. A plasma reactor as recited in claim 79, wherein said plasma source assembly is an electron cyclotron resonance (ECR) source assembly.

87. A plasma reactor as recited in claim 79, wherein said gas inlet supplies a gas into said plenum chamber.

88. A plasma reactor as recited in claim 87, wherein said gas includes at least one of hydrogen-bromide, octafluorocyclobutane, fluorocarbon compounds, silane, tungsten-tetrachloride, and titanium-tetrachloride.