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Chamber, exposure apparatus, and device manufacturing method

  • US 20050011581A1
  • Filed: 06/03/2004
  • Published: 01/20/2005
  • Est. Priority Date: 06/05/2003
  • Status: Active Grant
First Claim
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1. A chamber having a static-pressure bearing disposed therein, said chamber comprising:

  • an inside pressure gauge for detecting an inside pressure of said chamber; and

    a pressure controller for decreasing the inside pressure of said chamber on the basis of the detection made through said inside pressure gauge.

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