Micro-electro-mechanical switch, and methods of making and using it
First Claim
1. A method of fabricating a micro-electro-mechanical switch, comprising the steps of:
- forming on a base a first section which includes an electrically conductive part;
forming a resiliently flexible membrane having first and second ends engaging spaced portions of said base disposed on opposite sides of said first section, and having between said ends a second section which includes an electrically conductive portion, said membrane being capable of resiliently flexing so as to move between first and second positions so that said conductive part and said conductive portion are physically closer in said second position than in said first, position; and
forming on one of said first and second sections a textured surface and on the other thereof a further surface which faces said textured surface, said textured surface having mutually exclusive first and second portions which are respectively in physical contact with and free of physical contact with said further surface when said membrane is in said second position, said first portion of said textured surface having an area which is substantially less than a total area of said textured surface.
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Accused Products
Abstract
A micro-electro-mechanical (MEMS) switch (10, 110) has an electrode (22, 122) covered by a dielectric layer (23, 123), and has a flexible conductive membrane (31, 131) which moves between positions spaced from and engaging the dielectric layer. At least one of the membrane and dielectric layer has a textured surface (138) that engages the other thereof in the actuated position. The textured surface reduces the area of physical contact through which electric charge from the membrane can tunnel into and become trapped within the dielectric layer. This reduces the amount of trapped charge that could act to latch the membrane in its actuated position, which in turn effects a significant increase in the operational lifetime of the switch.
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Citations
4 Claims
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1. A method of fabricating a micro-electro-mechanical switch, comprising the steps of:
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forming on a base a first section which includes an electrically conductive part;
forming a resiliently flexible membrane having first and second ends engaging spaced portions of said base disposed on opposite sides of said first section, and having between said ends a second section which includes an electrically conductive portion, said membrane being capable of resiliently flexing so as to move between first and second positions so that said conductive part and said conductive portion are physically closer in said second position than in said first, position; and
forming on one of said first and second sections a textured surface and on the other thereof a further surface which faces said textured surface, said textured surface having mutually exclusive first and second portions which are respectively in physical contact with and free of physical contact with said further surface when said membrane is in said second position, said first portion of said textured surface having an area which is substantially less than a total area of said textured surface. - View Dependent Claims (2, 3, 4)
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Specification