MEMS digital-to-acoustic transducer with error cancellation
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Abstract
An acoustic transducer comprising a substrate; and a diaphragm formed by depositing a micromachined membrane onto the substrate. The diaphragm is formed as a single silicon chip using a CMOS MEMS (microelectromechanical systems) semiconductor fabrication process. The curling of the diaphragm during fabrication is reduced by depositing the micromachined membrane for the diaphragm in a serpentine-spring configuration with alternating longer and shorter arms. As a microspeaker, the acoustic transducer of the present invention converts a digital audio input signal directly into a sound wave, resulting in a very high quality sound reproduction at a lower cost of production in comparison to conventional acoustic transducers. The micromachined diaphragm may also be used in microphone applications.
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Citations
87 Claims
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1-53. -53. (Cancelled)
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54. An acoustic transducer, comprising:
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a substrate;
a micromachined membrane fabricated on said substrate;
a layer of material sealing said membrane to form a flexible diaphragm; and
electronics connected to said diaphragm. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74)
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75. An acoustic transducer, comprising:
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a substrate;
a micromachined membrane fabricated on said substrate;
a layer of material sealing said membrane to form a flexible diaphragm;
an input circuit for actuating said diaphragm; and
a feedback circuit coupled between said diaphragm and said input circuit. - View Dependent Claims (76, 77, 78, 79, 80, 81, 82, 83, 84)
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85. A method of audio reproduction, comprising:
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electrostatically biasing a MEMS diaphragm, said diaphragm fabricated on a supporting substrate in a first plane; and
providing an electrical audio input signal to said diaphragm to cause said diaphragm to move in a direction perpendicular to said first plane. - View Dependent Claims (86, 87)
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Specification