Method for detecting defects

• US 20050013475A1
• Filed: 08/12/2004
• Published: 01/20/2005
• Est. Priority Date: 11/28/2001
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Cohen, Yehuda, Levin, Evgeni
• Granted Patent: US 7,379,580 B2
• Time in Patent Office: Days
• US Class Current: 382/145
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/0002 Inspection of images, e.g. flaw detection
• CPC Class Codes: G06T 7/001 using an image reference approach
• CPC Class Codes: G06T 7/40 Analysis of texture depth or shape recovery from texture G06T7/529
• CPC Class Codes: H01L 21/67288 Monitoring of warpage, curvature, damage, defects or the like

Abstract

A method for inspecting a substrate for defects, including: (a) obtaining an inspected pixel and a reference pixel; (b) calculating an inspected value and a reference value, the inspected value representative of the inspected pixel and the reference value representative of the reference pixel; (c) selecting a threshold in response to a selected value out of the inspected value and the reference value; and (d) determining a relationship between the selected threshold, the reference value and the inspected value to indicate a presence of a defect.

Claims

1. A method for inspecting a substrate for defects, comprising:

obtaining an inspected pixel and a reference pixel;

calculating an inspected value and a reference value, the inspected value representative of the inspected pixel and the reference value representative of the reference pixel;

selecting exactly one of the inspected value and the reference value as a selected value based on a comparison of the inspected value and the reference value;

selecting a threshold in response to the selected value; and

determining a relationship between the selected threshold, the reference value and the inspected value to indicate a presence of a defect.

2. The method of claim 1 wherein selecting a selected value comprises evaluating which value out of the reference value and the inspected value is more noisy and selecting the less noisy value.

3. The method of claim 2 wherein the selected value is the lower value.

5. The method of claim 1 wherein the inspected value is representative of the inspected pixel and neighboring inspected pixels and the reference value is representative of the reference pixel and neighboring reference pixels.

6. The method of claim 1 wherein the relationship is a comparison between the selected threshold and a difference between the inspected value and the reference value.

7. The method of claim 1 wherein the inspected value is representative of a comparison between the inspected pixel and neighboring inspected pixels.

8. The method of claim 1 wherein the reference value is representative of a comparison between reference pixel and neighboring reference pixels.

9. The method of claim 1 wherein the inspected value represents a parameter selected from a group consisting of:

a gray level of the inspected pixel;

a ratio between the gray level of the inspected pixel and between a combination of gray levels of at least one inspected neighboring pixel;

a difference between the gray level of the inspected pixel and a combination of gray levels of at least one inspected neighboring pixel.

10. The method of claim 1 wherein the inspected value reflects a difference between a maximal gray level of a neighboring inspected pixel and a minimal gray level of a neighboring inspected pixel.

11. The method of claim 1 wherein the inspected value reflects an average between gray levels of neighboring inspected pixels.

12. The method of claim 1 wherein the inspected value reflects an average between gray levels of neighboring inspected pixels and the gray level of the inspected pixel.

13. The method of claim 1 wherein the selected value is utilized for determining a reference pixel and inspected pixel type.

14. The method of claim 13 further comprising a step of building a pixel type database reflecting the commonality of distinct values of a selected value.

15. The method of claim 14 further comprising a step of allocating selected value ranges to pixel types.

17. The method of claim 15 comprising allocating the selected value ranges such that each range includes at least one local maxima that is above a predefined threshold.

18. The method of claim 15 wherein allocating selected value ranges according to range information provided by an end user.

19. The method of claim 15 wherein the ranges represent patterned areas of a die, and background of a die, accordingly.

20. The method of claim 15 wherein the ranges represent periodic cells, non-periodic cells and background, accordingly.

21. The method of claim 14 further comprising a step of updating the pixel type database during the step of selecting a selected value out of the inspected value and the reference value.

22. The method of claim 1 further comprising a step of building a reference inspected database reflecting the commonality of a pair of inspected value and reference value.

23. The method of claim 22 further comprising a step of defining a threshold in response to the reference inspected database.

24. The method of claim 13 further comprising a step of building, for each pixel type, a reference inspected type database reflecting the commonality of a pair of inspected value and reference value of inspected values pixels that belong to the pixel type.

25. The method of claim 24 further comprising a step of determining a threshold for each pixel type in response to the reference inspected database associated with the pixel type.

26. The method of claim 25 wherein the step of selecting a threshold comprises selecting a threshold that is associated with a pixel type of the selected pixel out of the inspected pixel and the reference pixel

32. The method of claim 1 wherein the reference pixel is obtained from memory.

33. The method of claim 1 wherein the reference pixel is obtained from another die.

34. The method of claim 1 wherein the reference pixel is obtained from a pattern that is ideally identical to a pattern from which the inspected pixel is obtained.

35. The method of claim 1 wherein the step of calculating comprises providing an alarm signal indicative of a probability of a presence of a defect.

36. The method of claim 35 further comprising a step of building a reference inspected database reflecting the commonality of a pair of inspected value and reference value.

37. The method of claim 36 further comprising a step of defining a threshold in response to the reference inspected database.

38. The method of claim 37 wherein a value of the alarm signal is responsive to a distance between the selected threshold and the pair of inspected value and reference value.

4. (Cancelled)

16. (Cancelled)

27-31. -31. (Cancelled)

39. A method for inspecting a substrate for defects, comprising:

illuminating the substrate;

obtaining an inspected pixel;

calculating an inspected value representative of the inspected pixel;

determining whether to obtain a reference pixel from a same die of the inspected pixel or from a reference pixel from another die;

obtaining a reference pixel in response to the determination;

calculating an inspected value representative of the inspected pixel;

selecting exactly one of the inspected value and the reference value as a selected value based on a comparison of the inspected value and the reference value;

selecting a threshold in response to the selected value; and

comparing the selected threshold to a difference between the reference value and the inspected value to determine the presence of a defect.

40. The method of claim 39 wherein selecting a selected value comprises a step of evaluating which value out of the reference value and the inspected value is more noisy and selecting the less noisy value.

41. The method of claim 40 wherein the selected value is the lower value.

43. The method of claim 39 wherein the inspected value is representative of the inspected pixel and neighboring inspected pixels or of a comparison between the inspected pixel and neighboring inspected pixels.

44. The method of claim 39 wherein the inspected value is representative of a parameter selected from the group consisting of:

a gray level of the inspected pixel;

a ratio between the gray level of the inspected pixel and between a combination of gray levels of at least one inspected neighboring pixel;

a difference between the gray level of the inspected pixel and a combination of gray levels of at least one inspected neighboring pixel;

a difference between a maximal gray level of a neighboring inspected pixel and a minimal gray level of a neighboring inspected pixel; and

an average between gray levels of neighboring inspected pixels.

45. The method of claim 39 wherein the selected value is utilized for determining a reference pixel and inspected pixel type.

46. The method of claim 45 further comprising a step of determining the inspected pixel type and the step of determining is responsive to the inspected pixel type.

47. The method of claim 39 further comprising a step of building a pixel type database reflecting the commonality of distinct values of the selected value.

48. The method of claim 47 further comprising a step of allocating selected value ranges to pixel types.

50. The method of claim 47 comprising allocating selected value ranges such that each range includes at least one local maxima that is above a predefined threshold.

51. The method of claim 47 wherein allocating selected value ranges according to range information provided by an end user.

52. The method of claim 47 wherein the ranges represent patterned areas of a die, and background of a die, accordingly.

53. The method of claim 47 wherein the ranges represent periodic cells, non-periodic cells and background, accordingly.

54. The method of claim 47 further comprising a step of updating the pixel type database during the step of selecting a selected value out of the inspected value and the reference value.

55. The method of claim 39 further comprising a step of building a reference inspected database reflecting the commonality of a pair of inspected value and reference value.

56. The method of claim 55 further comprising a step of defining a threshold in response to the reference inspected database.

57. The method of claim 45 further comprising a step of building, for each pixel type, a reference inspected type database reflecting the commonality of a pair of inspected value and reference value of inspected values pixels that belong to the pixel type.

58. The method of claim 57 further comprising a step of determining a threshold for each pixel type in response to the reference inspected database associated with the pixel type.

59. The method of claim 57 wherein the step of selecting a threshold comprises selecting a threshold that is associated with a pixel type of the selected pixel out of the inspected pixel and the reference pixel

65. The method of claim 39 wherein the step of calculating comprises providing an alarm signal indicative of a probability of a presence of a defect.

66. The method of claim 39 further comprising a step of building a reference inspected database reflecting the commonality of a pair of inspected value and reference value.

67. The method of claim 66 further comprising a step of defining a threshold in response to the reference inspected database.

68. The method of claim 67 wherein a value of the alarm signal is responsive to a distance between the selected threshold and the pair of inspected value and reference value.

70. The method of claim 39 wherein the variance of the neighborhood is responsive to at least one parameter selected from the group consisting of:

a ratio between the gray level of the inspected pixel and between a combination of gray levels of at least one inspected neighboring pixel;

a difference between the gray level of the inspected pixel and a combination of gray levels of at least one inspected neighboring pixel;

a difference between a maximal gray level of a neighboring inspected pixel and a minimal gray level of a neighboring inspected pixel; and

an average between gray levels of neighboring inspected pixels.

42. (Cancelled)

49. (Cancelled)

60-64. -64. (Cancelled)

69. (Cancelled)

71. A method for inspecting a substrate for defects, comprising:

obtaining an inspected pixel, inspected neighboring pixels and a reference pixel;

calculating an inspected value, a second inspected value and a reference value, the second inspected value representative of the inspected pixel alone, the reference value representative of the reference pixel and neighboring reference pixels and the inspected value representative of the inspected pixel and inspected neighboring pixels;

selecting exactly one of the inspected value and the reference value as a selected value based on a comparison of the inspected value and the reference value;

selecting a first threshold and a second threshold in response to the selected value;

determining a first relationship between the selected first threshold, the inspected value and the second inspected value, determining a second relationship between the selected second threshold, the inspected value and the reference value; and

indicating a presence of a defect in response to at least one of the first relationship and the second relationship.

72. The method of claim 71 wherein the first relationship reflects a distance between the selected first threshold and a data element reflecting both the inspected value and the second inspected value.

73. The method of claim 71 wherein the second relationship reflects a distance between the selected second threshold and a data element reflecting both the inspected value and the reference value.

74. The method of claim 71 wherein the step of indicating comprises selecting a selected relationship out of the first relationship and the second relationship.

76. The method of claim 71 wherein selecting a selected value comprises a step of evaluating which value out of the reference value and the inspected value is more noisy and selecting the less noisy value.

77. The method of claim 76 wherein the selected value is the lower value.

79. The method of claim 71 wherein the reference value represents a parameter selected from a group consisting of:

a gray scale of the reference pixel;

a ratio between the gray scale of the reference pixel and between a combination of gray scales of at least one reference neighboring pixel;

a difference between the gray scale of the reference pixel and a combination of gray scales of at least one reference neighboring pixel.

80. The method of claim 71 wherein the inspected value represents a combination of at least one gray scale of at least one inspected neighboring pixel.

81. The method of claim 71 wherein the inspected value reflects a difference between a maximal gray scale of a neighboring inspected pixel and a minimal gray scale of a neighboring inspected pixel.

82. The method of claim 71 wherein the inspected value reflects an average of gray scales of neighboring inspected pixels.

83. The method of claim 71 wherein the reference value reflects an average of gray scales of neighboring reference pixels and the gray scale of the reference pixel.

84. The method of claim 71 wherein the second inspected value reflects a brightness of the inspected pixel.

85. The method of claim 71 wherein the selected value is utilized for determining a reference pixel and inspected pixel type.

86. The method of claim 85 further comprising a step of building a pixel type database reflecting the commonality of distinct values of the selected value.

87. The method of claim 86 further comprising a step of allocating selected value ranges to pixel types.

89. The method of claim 87 comprising allocating selected value ranges such that each range includes at least one local maxima that is above a predefined threshold.

90. The method of claim 87 wherein allocating selected value ranges according to range information provided by an end user.

91. The method of claim 87 wherein the ranges represent patterned areas of a die, and background of a die, accordingly.

92. The method of claim 87 wherein the ranges represent periodic cells, non-periodic cells and background, accordingly.

93. The method of claim 86 further comprising a step of updating the pixel type database during the step of selecting a selected value out of the inspected value and the reference value.

94. The method of claim 71 further comprising a step of building a reference inspected database reflecting the communality of a pair of inspected value and reference value, and building an inspected neighborhood database reflecting the communality of pair of inspected value and neighboring inspected value.

95. The method of claim 94 further comprising a step of defining a set of first thresholds in response to the reference inspected database.

96. The method of claim 94 further comprising a step of defining a set of second thresholds in response to the inspected neighborhood database.

97. The method of claim 85 further comprising a step of building, for each pixel type, a reference inspected type database reflecting the commonality of a pair of inspected value and reference value of pixels that belong to that pixel type.

98. The method of claim 97 further comprising a step of determining a first threshold for each pixel type in response to the reference inspected type database associated with said pixel type.

99. The method of claim 97 wherein the step of selecting a first threshold out of a set of first thresholds comprises selecting a first threshold that is associated with a pixel type of the selected pixel out of the inspected pixel and the reference pixel.

105. The method of claim 85 further comprising a step of building, for each pixel type, a neighborhood inspected type database reflecting the commonality of a pair of inspected value and reference value of pixels that belong to that pixel type.

106. The method of claim 105 further comprising a step of determining a second threshold for each pixel type in response to the neighborhood inspected type database associated with said pixel type.

107. The method of claim 105 wherein the step of selecting a second threshold out of a set of second thresholds comprises selecting a second threshold that is associated with a pixel type of the selected pixel out of the inspected pixel and the reference pixel.

75. (Cancelled)

78. (Cancelled)

88. (Cancelled)

100-104. -104. (Cancelled)

108-112. -112. (Cancelled)