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Direct write process and apparatus

  • US 20050015175A1
  • Filed: 07/15/2003
  • Published: 01/20/2005
  • Est. Priority Date: 07/15/2003
  • Status: Active Grant
First Claim
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1. A direct write process for fabricating a desired circuit component onto a substrate surface of a microelectronic device according to a computer-aided design (CAD), said process comprising:

  • (a) providing a support member by which said device substrate is supported while said component is being fabricated;

    (b) providing a chamber for containing a precursor fluid material under a substantially constant pressure differential relative to the ambient pressure, said precursor fluid material having a viscosity no less than 10 cps;

    (c) operating an inkjet-based single-orifice or multiple-orifice dispensing head for dispensing and depositing minute droplets of said precursor fluid material through at least one discharge orifice onto said substrate surface, said dispensing head having valve means in control relation to said dispensing head for switching said head on and off on demand;

    (d) operating a material treatment means to convert said deposited precursor material to said desired component; and

    (e) operating machine control means for generating control signals in response to coordinates of said CAD and for controlling the position of said dispensing head relative to said support member or said substrate in response to said control signals to control dispensing and depositing of said precursor material to form said component of a desired shape and dimension on said substrate surface.

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