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Capacitive pressure transmitter

  • US 20050016286A1
  • Filed: 08/20/2004
  • Published: 01/27/2005
  • Est. Priority Date: 06/18/2002
  • Status: Active Grant
First Claim
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1. A capacitive pressure transmitter comprising:

  • a capacitive pressure sensor including;

    a sensor body defining a chamber therein, the sensor body having a plurality of sensor inlets in fluidic communication with the chamber;

    a conductive deflectable diaphragm disposed in the chamber;

    at least one capacitive plate disposed in the chamber relative to the diaphragm such that diaphragm deflection generates a change in capacitance between the at least one plate and the diaphragm; and

    a non-conductive layer interposed between the at least one plate and the diaphragm; and

    a process media inlet operably coupled to one of the plurality of sensor inlets and adapted to couple to a source of process media to bring the process media into direct contact with the measuring diaphragm;

    a second transmitter inlet operably coupled to the other of the plurality of sensor inlets;

    sensor circuitry coupled to the capacitive pressure sensor to generate a sensor signal based upon the capacitance of the capacitive pressure sensor; and

    transmitter circuitry coupled to the sensor circuitry to transmit information relative to the sensor signal over a process communication loop.

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