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Surface treatment system and method

  • US 20050016455A1
  • Filed: 12/30/2002
  • Published: 01/27/2005
  • Est. Priority Date: 03/29/2002
  • Status: Active Grant
First Claim
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1. A surface treatment system for forming a deposition layer at a surface of an object of surface treatment by using a deposition reaction in which electrode unit for applying power to form a deposition reaction in the deposition chamber is installed between an inner wall of the deposition chamber and an object of surface treatment, further comprising:

  • a cooling unit installed at the inner wall of the deposition chamber facing the electrode and cooling ambient thereof.

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