Nozzle plate member for supplying fluids in dispersed manner and manufacturing method of the same

• US 20050017100A1
• Filed: 08/25/2004
• Published: 01/27/2005
• Est. Priority Date: 06/22/2000
• Status: Active Grant

• Current Assignee: Akira Fukuchi, Katsumi Watanabe
• Original Assignee: Akira Fukuchi, Katsumi Watanabe
• Inventors: Watanabe, Katsumi, Fukuchi, Akira
• Granted Patent: US 7,150,418 B2
• Time in Patent Office: Days
• US Class Current: 239/596
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: Y10T 29/49412 with assembly, disassembly or composite article making
• CPC Class Codes: Y10T 29/49416 with material shaping or cutting
• CPC Class Codes: Y10T 29/49423 including metal deforming

Abstract

The present invention is directed to a gas supply nozzle plate constructed by laminating a plurality of metal members each having a fluid path and branch. A fluid nozzle plate member provided by the invention has high sealing at a joined part, and high reliability even when used in high vacuum or at a high temperature. The fluid nozzle plate member comprises a plurality of plate-like metal members each having a fluid path and/or a branch. In this case, the plurality of plate-like metal members are laminated, and the laminated surfaces thereof are joined together by press forging.

Claims

1. A nozzle plate member for supplying fluids in a dispersed manner, comprising:

a plurality of plate-like metal members each having a fluid path and/or a branch for supplying fluids on the surface of the metal members, said metal members being provided with a first annular groove or annular protrusion on the entire periphery of the same surface of the metal members,

and/or,

said metal members being provided with a second annular groove provided around the fluid path and/or a branch portion on a surface of one of the laminated metal members and a second annular protrusion provided around the fluid path and/or a branch on a surface of the metal member oppositely to the former,

wherein an annular groove is respectively provided around the fluid path and/or the branch in opposing positions of the surfaces being joined of the plurality of metal members, an intermediate metal member for filling the both of the annular grooves is inserted, the metal members are laminated, and then press forging is executed to form metal bonding.

2. A nozzle plate member for supplying fluids in a dispersed manner according to claim 1, wherein the fluid path and/or the branch is formed for each kind of fluids, annular grooves are respectively provided around the fluid path and/or the branch in positions defined for each kind of the fluids on both of the metal members.

3. A nozzle plate member for supplying fluids in a dispersed manner according to claim 1, wherein the fluid path and/or the branch portion is formed for each kind of fluids, an annular protrusion is provided through which the fluid path is provided and is extended through an opposing plate-like metal member.

4. A nozzle plate member for supplying fluids in a dispersed manner according to claim 1, wherein each of the metal members is made of one selected from aluminum metal or an aluminum alloy.

5. A nozzle plate member for supplying fluids in a dispersed manner according to claim 3, wherein further the fluid path and/or the branch formed in the metal member made of one selected from the aluminum metal and the aluminum alloy is subjected to surface-treatment to prevent corrosion.

6. A nozzle plate member for supplying fluids in a dispersed manner according to claim 1, wherein the nozzle plate member is adapted to disperse and supply gas for film formation on a semiconductor device, alternatively a liquid crystal display device.

9. A manufacturing method of a nozzle plate member for supplying fluids in a dispersed manner according to claim 6, wherein further an annular groove is provided around the fluid path and/or a branch on a surface of one of the laminated plate-like metal members, an annular groove is also provided around the fluid path and/or a branch on another surface of the metal member placed oppositely to the former, an intermediate metal member to fit in the annular grooves is inserted, and then press forging is executed to form metal bonding.

10. A manufacturing method of a nozzle plate member for supplying fluids in a dispersed manner according to claim 6, wherein each of the metal members is made of one selected from aluminum metal and an aluminum alloy.

11. A manufacturing method of a nozzle plate member for supplying fluids in a dispersed manner according to claim 10, wherein further a step is provided to subject the fluid path and/or the branch formed in the metal member made of one selected from the aluminum metal and the aluminum alloy beforehand to surface treatment to prevent surface corrosion.

12. A manufacturing method of a nozzle plate member for supplying fluids in a dispersed manner according to claim 10, wherein the press forging is carried out at a pressure set in a range of 3 to 100 kgf/mm2.

13. A manufacturing method of a nozzle plate member for supplying fluids in a dispersed manner according to claim 10, wherein the press forging is carried out at a temperature in a range of 300 to 500 degree C.

7. A method of manufacturing a nozzle plate member for supplying fluids in a dispersed manner, comprising the steps of:

preparing a plurality of plate-like metal members each having a fluid path and/or a branch and an annular groove or another annular groove on a peripheral surface of the metal member; and

laminating the plurality of plate-like metal members by inserting intermediate members into the groove, and joining the laminated surface thereof by press forging.

8. A manufacturing method of a nozzle plate member for supplying fluids in a dispersed manner according to claim 7, wherein further an annular groove is provided around the fluid path and/or a branch on a surface of one of the laminated plate-like metal members, an annular protrusion is provided around the fluid path and/or a branch in another surface of the metal member being placed oppositely to the former, the annular protrusion is inserted into the annular groove, and then press forging is executed to form metal bonding.

14. A nozzle plate member for supplying fluids in a dispersed manner, comprising:

a plurality of plate-like metal members each having a fluid path and/or a branch for supplying fluids on the surface of the metal members,

said metal members being provided with a first annular groove, another first annular groove in the opposing positions and an intermediate metal member for filling both of the annular grooves on the entire periphery of the same surface of the metal members,

and/or,

said metal members being provided with a second annular groove provided around the fluid path and/or a branch portion on a surface of one of the laminated metal members and a second annular protrusion provided around the fluid path and/or a branch on a surface of the metal member oppositely to the former,

wherein an annular groove is respectively provided around the fluid path and/or the branch in opposing positions of the surfaces being joined of the plurality of metal members, an intermediate metal member for filling the both of the annular grooves is inserted, the metal members are laminated, and then press forging is executed to form metal bonding.