Apparatus for low coherence ranging
2 Assignments
0 Petitions
Accused Products
Abstract
An apparatus for performing low coherence ranging of a sample with high transverse resolution and large depth of focus, comprising an optical ranging system comprising a light source, a means for directing light from the light source to the sample, a means for directing reflected light from the sample to a detector, at least one detector, a means for processing light data received by the detector and which generates an image; and an optical element having a transverse resolution defined as .Δris less than or equal to about 5 μm, and a depth of focus Δz of at least about 50 μm.
194 Citations
97 Claims
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1-47. -47. (Canceled).
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48. An apparatus for imaging at least a portion of a sample, comprising:
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a first inferometric arrangement providing an electro-magnetic radiation; and
a second arrangement configured to receive the electromagnetic radiation, and configured to generate a resultant electromagnetic intensity distribution, wherein, along a particular direction, the intensity distribution is approximately constant for at least a predetermined distance. - View Dependent Claims (49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61)
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62. An apparatus for imaging at least a portion of a sample, comprising:
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a first inferometric arrangement providing an electro-magnetic radiation; and
a second arrangement configured to receive the electromagnetic radiation, and configured to generate a resultant electromagnetic intensity distribution, wherein, along a particular direction, widths of at least two sections of the intensity distribution are approximately the same. - View Dependent Claims (63, 64, 65, 66, 67, 68, 69)
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70. A method for imaging at least a portion of a sample, comprising:
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a) providing an electromagnetic radiation using an inferometric arrangement;
b) receiving the electromagnetic radiation and generating a resultant electro-magnetic intensity distribution, wherein, along a particular direction, the intensity distribution is approximately constant for at least a predetermined distance. - View Dependent Claims (71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83)
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84. A method for imaging at least a portion of a sample, comprising:
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providing an electromagnetic radiation using a inferometric arrangement; and
receiving the electromagnetic radiation, and generating a resultant electro-magnetic intensity distribution, wherein, along a particular direction, widths of at least two sections of the intensity distribution are approximately the same. - View Dependent Claims (85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97)
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Specification