Position measuring device
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Accused Products
Abstract
A position measuring device for detecting the spatial position of a movable element in relation to a base body, the device including a linear measuring device that measures a distance between a movable element and a base body and an angle-measuring apparatus that measures an angle between the movable element and the base body. A light source that directs light along a beam path, a detector within the beam path and a grating within the beam path between the light source and the detector. For measuring the angle, the beam path extends between the movable element and the base body so that an intensity strip pattern is created by illuminating the grating by the light source, whose position relative to the detector is a measure of the angle.
28 Citations
35 Claims
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1-13. -13. (canceled)
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14. A position measuring device for detecting the spatial position of a movable element in relation to a base body, comprising:
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a linear measuring device that measures a distance between a movable element and a base body;
an angle-measuring apparatus that measures an angle between said movable element and said base body;
a light source that directs light along a beam path;
a detector within said beam path;
a grating within said beam path between said light source and said detector, wherein for measuring said angle said beam path extends between said movable element and said base body so that an intensity strip pattern is created by illuminating said grating by said light source, whose position relative to said detector is a measure of said angle. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A position measuring system comprising:
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a program-controlled machine comprising;
a base element; and
a movable portion that moves relative to said base;
a position measuring device comprising;
a linear measuring device that measures a distance between a movable element that is fixed to said movable portion and a base body that is fixed to said base element;
an angle-measuring apparatus that measures an angle between said movable element and said base body;
a light source that directs light along a beam path;
a detector within said beam path;
a grating within said beam path between said light source and said detector, wherein for measuring said angle said beam path extends between said movable element and said base body so that an intensity strip pattern is created by illuminating said grating by said light source, whose position relative to said detector is a measure of said angle. - View Dependent Claims (30, 31, 32, 33, 34, 35)
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Specification