Magnetically actuated fast MEMS mirrors and microscanners
First Claim
1. A magnetically driven device for reflecting light signals comprising:
- a. a plate operative to reflect light; and
b. at least two conductive flexural actuators, each said actuator connected at a first actuator end to said plate and at a second actuator end to a substrate, each said actuator operative to impart a non-torsional motion to said plate under a force arising from the interaction of a current passing through said conductive flexural actuators and a magnetic field.
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Accused Products
Abstract
Magnetically and electromagnetically driven MEMS devices for reflecting light signals and for switching radio frequency (RF) signals are provided. In a preferred embodiment, a light reflecting device such as a mirror or micro-scanner comprises a plate operative to reflect light and at least two conductive flexural actuators connected to the plate and to a substrate and operative to impart a rotation or tilt motion to the plate under a force arising from the interaction of a current passing through the conductive flexural actuators and a magnetic field parallel to the substrate. An RF switch comprises a substrate and a membrane having a longitudinal dimension and a lateral dimension, the membrane positioned substantially parallel to and attached to the substrate and operative to provide at least two switching positions in response to actuation by a Lorenz force acting on it.
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Citations
29 Claims
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1. A magnetically driven device for reflecting light signals comprising:
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a. a plate operative to reflect light; and
b. at least two conductive flexural actuators, each said actuator connected at a first actuator end to said plate and at a second actuator end to a substrate, each said actuator operative to impart a non-torsional motion to said plate under a force arising from the interaction of a current passing through said conductive flexural actuators and a magnetic field. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for manipulating light comprising the steps of:
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a. providing a plate operative to reflect light;
b. providing at least two conductive flexural actuators connected at a first actuator end to said plate and at a second actuator end to a substrate, each said conductive flexural actuator operative to impart a motion to said plate under a force arising from the interaction of a current passing through said flexural actuator and a magnetic field; and
c. imparting a motion to said plate, whereby light impinging on said plate is reflected at a given angle. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A micro-electro-mechanical system (MEMS) light reflecting device comprising:
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a. a substrate having a substrate plane;
b. a reflective plate having a longitudinal dimension and a lateral dimension positioned substantially in said substrate plane and connected to said substrate through a conductive flexural mechanism;
c. a rotation mechanism operative to induce a rotation of said reflective plate around a virtual axis parallel to said lateral dimension and perpendicular to said conductive flexural mechanism. - View Dependent Claims (18, 19, 20, 21)
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22. A micro-electro-mechanical system (MEMS) light reflecting device comprising:
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a. a substrate having a substrate plane that includes a center cavity; and
b. a membrane having a longitudinal dimension and a lateral dimension and positioned substantially parallel to said substrate plane and attached to said substrate, said membrane further having a reflective center section positioned substantially to overlap said cavity, wherein said membrane center section is operative to rotate in response to actuation around an axis parallel to said substrate plane. - View Dependent Claims (23, 24, 25, 26)
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27. A micro-electro-mechanical system (MEMS) radio frequency (RF) switch comprising:
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a. a substrate having a substrate plane; and
b. a membrane having a longitudinal dimension and a lateral dimension and positioned substantially parallel to said substrate plane and attached to said substrate, said membrane operative to provide at least two switching positions in response to actuation by a Lorenz force. - View Dependent Claims (28, 29)
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Specification