Process for producing metal thin films by ALD
First Claim
1. A method of forming a dual damascene structure comprising depositing a seed layer by an atomic layer deposition process, the seed layer comprising at least one noble metal.
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Abstract
The invention relates generally to processes for producing electrically conductive noble metal thin films on a substrate by atomic layer deposition. According to one embodiment of the invention a substrate with a surface is provided in a reaction chamber and a vaporised precursor of a noble metal is pulsed into the reaction chamber. By contacting the vaporised precursor with the surface of the substrate, no more than about a molecular layer of the metal precursor is formed on the substrate. In a next step, a pulse of molecular oxygen-containing gas is provided in the reaction chamber, where the oxygen reacts with the precursor on the substrate. Thus, high-quality metal thin films can be deposited by utilising reactions between the metal precursor and oxygen. In one embodiment, electrically conductive layers are deposited in structures that have high aspect ratio vias and trenches, local high elevation areas or other similar surface structures that make the surface rough.
92 Citations
32 Claims
- 1. A method of forming a dual damascene structure comprising depositing a seed layer by an atomic layer deposition process, the seed layer comprising at least one noble metal.
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7. A process for copper metallization comprising forming a seed layer on trenches and vias in a damascene structure by:
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placing a substrate with trenches and vias in a reaction chamber; and
providing alternating and sequential vapor phase pulses of a metal source chemical and an oxygen source chemical into the reaction chamber, wherein the metal source chemical comprises a metal selected from the group consisting of ruthenium, rhodium, palladium, silver, rhenium, osmium, iridium and platinum. - View Dependent Claims (8, 9, 10, 11, 12, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method of depositing a ruthenium seed layer on a substrate in a reaction chamber comprising:
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providing a vaporized ruthenium precursor into the reaction chamber to form no more than about one monolayer of the precursor on the substrate;
removing excess ruthenium precursor from the reaction chamber;
providing a second reactant gas pulse comprising oxygen to the reaction chamber;
removing excess second reactant gas from the reaction chamber; and
repeating until a ruthenium seed layer of the desired thickness is formed. - View Dependent Claims (23, 24, 25, 26, 27, 28)
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29. A method of depositing a diffusion barrier on a dual damascene structure, comprising the steps of:
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placing a substrate with trenches and vias in a reaction chamber;
growing a seed layer on the substrate from alternating vapor phase pulses of a metal source chemical and an oxygen source chemical that are separated from each other, the metal being selected from the group consisting of ruthenium, rhodium, palladium, silver, rhenium, osmium, iridium and platinum; and
depositing copper on the seed layer. - View Dependent Claims (30, 31, 32)
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Specification