Method and apparatus for cleaning and method and apparatus for etching
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Accused Products
Abstract
A cleaning apparatus (30) is connected to a treating chamber (12) of a CVD apparatus (10) for forming a silicon film. The cleaning apparatus (30) has a first, a second, and a third gas sources (32, 34, 36) and a chlorine gas, a fluorine gas, and an inert gas are introduced from the gas sources through FMC (38a, 38b, 38c), respectively, with flow rates controlled independently from one another. Those gases are gathered at a pipe (42) and mixed into a mixed gas. The mixed gas is passed through a heated reactor (44) such as a heat exchanger to thereby react the chlorine gas with the fluorine gas and form a formed gas containing fluorinated chlorine gas such as CIF3. The formed gas is supplied to the treating chamber (12) through a cooler (46), an analyzer (48) and a buffer (54).
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Citations
26 Claims
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1-11. -11. (canceled).
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12. A cleaning method that removes a by-product material in a treating chamber of a semiconductor processing system, comprising the steps of:
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i) introducing a nonfluorine first halogen gas from a first gas source;
ii) mixing a fluorine gas from a second gas source;
iii) mixing an inert gas from a third gas source;
iv) feeding the mixed gas into a reactor;
v) heating said mixed gas to a temperature at which said first halogen gas and fluorine gas react;
vi) producing an interhalogen fluorine compound gas; and
vii) feeding said compound gas concurrent with its production into said treating chamber. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A cleaning apparatus that removes a by-product material in a treating chamber of a semiconductor processing system that comprises:
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i) an upstream section that forms a mixed gas; and
ii) a downstream section that produces an interhalogen fluorine compound gas, wherein said mixed gas consists of a nonfluorine first halogen gas from a first gas source, a fluorine gas from a second gas source, and an inert gas from a third gas source, wherein said interhalogen fluorine compound gas is produced by feeding said mixed gas into a reactor and heating said mixed gas to a reacting temperature, and wherein said compound gas is fed concurrent with its production into said treating chamber. - View Dependent Claims (19, 20, 21)
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22. An etching method for a semiconductor processing system that etches a first film on a treatment substrate comprising the steps of:
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i) introducing a nonfluorine first halogen gas from a first gas source;
ii) mixing a fluorine gas from a second gas source;
iii) mixing an inert gas from a third gas source;
iv) feeding the mixed gas into a reactor;
v) heating said mixed gas to a temperature at which said first halogen gas and fluorine gas react;
vi) producing an interhalogen fluorine compound gas;
vii) feeding said compound gas concurrent with its production into said treating chamber, and wherein said first film comprises at least one component selected from the group consisting of;
a) Si, b) POS, c) Ta, and d) TaSix. - View Dependent Claims (23, 24)
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25. An etching apparatus for a semiconductor processing system that etches a first film on a treatment substrate, comprising:
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i) a treating chamber that holds said treatment substrate;
ii) an upstream section that forms a mixed gas; and
iii) a downstream section that produces an interhalogen fluorine compound gas, wherein said mixed gas consists of a nonfluorine first halogen gas from a first gas source, a fluorine gas from a second gas source, and an inert gas from a third gas source, wherein said interhalogen fluorine compound gas is produced by feeding said mixed gas into a reactor and heating said mixed gas to a reacting temperature, wherein said compound gas is fed concurrent with its production into said treating chamber, and wherein said first film substantially comprises at least one component selected from the group consisting of;
a) Si, b) SIPOS, c) Ta, and d) TaSix. - View Dependent Claims (26)
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Specification