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Etchant composition for molybdenum and method of using same

  • US 20050020081A1
  • Filed: 08/25/2004
  • Published: 01/27/2005
  • Est. Priority Date: 03/20/2000
  • Status: Abandoned Application
First Claim
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1. An etchant composition for etching molybdenum, comprising:

  • 5 to 20% by weight of hydrogen peroxide (H2O2);

    75 to 94% by weight of water; and

    an additive activating an etching action of the hydrogen peroxide.

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