Etchant composition for molybdenum and method of using same

• US 20050020081A1
• Filed: 08/25/2004
• Published: 01/27/2005
• Est. Priority Date: 03/20/2000
• Status: Abandoned Application

• Current Assignee: LG Display Co., Ltd.
• Original Assignee: LG Display Co., Ltd.
• Inventors: Kim, Ky-Sub, Lee, Sok-Joo, Song, Hyung-Soo, Park, Min-Choon
• Application Number:
  US10/925,003
• Publication Number:
  US 20050020081A1
• Time in Patent Office: Days
• US Class Current: 438/689
• CPC Class Codes: C23F 1/26 for etching refractory metals

Abstract

An etchant composition for molybdenum includes: 5 to 20% by weight of hydrogen peroxide (H₂O₂); 75 to 94% by weight of water; and an additive including a pH controlling agent. The etching composition is particularly useful for the fabrication of semiconductor devices. Molybdenum may be etched from a substrate by applying the etchant composition, preferably by spraying or immersion, and preferably at a temperature range of 30° C. to 45° C.

Claims

1. An etchant composition for etching molybdenum, comprising:

5 to 20% by weight of hydrogen peroxide (H₂O₂);

75 to 94% by weight of water; and

an additive activating an etching action of the hydrogen peroxide.

2. The etchant composition of claim 1, wherein the additive is selected from a group consisting of ammonium sulfate, ammonium nitrate, sodium dihydrogen citrate/disodium hydrogen citrate, disodium hydrogen phosphate/trisodium citrate, or ammonium acetate.

3. The etchant composition of claim 1, wherein the additive further comprises a surfactant.

4. The etchant composition of claim 3, wherein the surfactant is a fluorine-based surfactant.

5. The etchant composition of claim 1, wherein the hydrogen peroxide is 8 to 18% by weight.

6. The etchant composition of claim 5, wherein the additive is selected from a group consisting of ammonium sulfate, ammonium nitrate, sodium dihydrogen citrate/disodium hydrogen citrate, disodium hydrogen phosphate/trisodium citrate, or ammonium acetate.

12. The etchant composition of claim 1, wherein the additive includes a pH controlling agent.

7-11. -11. (Canceled).