Method and apparatus for producing photocatalyst
First Claim
Patent Images
1. A method of producing a photocatalyst comprising:
- a first step of forming an amorphous titanium oxide on a substrate; and
a second step of crystallizing at least a portion of the titanium oxide by heating the titanium oxide in an atmosphere containing oxygen.
1 Assignment
0 Petitions
Accused Products
Abstract
A method of producing a photocatalyst according to the invention comprises forming an amorphous titanium oxide and heat-treating it in an atmosphere containing oxygen, whereby a photocatalyst having a good photocatalysis can be obtained. In particular, the amorphous titanium oxide is obtained by using the reactive sputtering method and via deposition at a low temperature and at a high film formation rate. This apparatus can be provided with cooling means to allow enhancement of the throughput of the film formation process.
28 Citations
14 Claims
-
1. A method of producing a photocatalyst comprising:
-
a first step of forming an amorphous titanium oxide on a substrate; and
a second step of crystallizing at least a portion of the titanium oxide by heating the titanium oxide in an atmosphere containing oxygen. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. An apparatus for producing a photocatalyst being capable of depositing an amorphous titanium oxide on a substrate in an atmosphere having subatmospheric pressure, comprising:
cooling means for cooling the substrate. - View Dependent Claims (13, 14)
Specification