System and method for filtering output in mass flow controllers and mass flow meters
10 Assignments
0 Petitions
Accused Products
Abstract
Embodiments of the present invention can include the steps of (i) filtering the indicated flow to derive an intermediate filtered indicated flow, (ii) deriving a weighted first derivative of the intermediate filtered indicated flow, and (iii) outputting a filtered indicated flow comprising the sum of the intermediate filtered indicated flow and the weighted first derivative of the intermediate filtered indicated flow. The indicated flow can be filtered using a FIR, an IIR a running average or other filtering scheme.
16 Citations
32 Claims
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1-11. -11. (Cancelled)
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12. A method for filtering an indicated flow comprising:
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filtering said indicated flow to derive an intermediate filtered indicated flow;
deriving a weighted first derivative of said intermediate filtered indicated flow; and
summing said intermediate filtered indicated flow and said weighted first derivative of said intermediate filtered indicated flow to derive a filtered indicated flow.
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13-25. -25. (Cancelled)
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26. A method for filtering an indicated flow comprising:
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filtering said indicated flow to derive an intermediate filtered indicated flow;
deriving a weighted first derivative of said intermediate filtered indicated flow; and
summing said intermediate filtered indicated flow and said weighted first derivative of said intermediate filtered indicated flow to derive a filtered indicated flow;
wherein said intermediate filtered indicated flow is derived using running average.
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27. A method for filtering an indicated flow comprising:
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filtering said indicated flow to derive an intermediate filtered indicated flow;
deriving a weighted first derivative of said intermediate filtered indicated flow; and
summing said intermediate filtered indicated flow and said weighted first derivative of said intermediate filtered indicated flow to derive a filtered indicated flow;
wherein said intermediate filtered indicated flow is derived using IIR.
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28. A method for filtering an indicated flow comprising:
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filtering said indicated flow to derive an intermediate filtered indicated flow;
deriving a weighted first derivative of said intermediate filtered indicated flow; and
summing said intermediate filtered indicated flow and said weighted first derivative of said intermediate filtered indicated flow to derive a filtered indicated flow;
wherein said intermediate filtered indicated flow is derived using FIR.
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29. A system for filtering an indicated flow comprising a flow device operable to:
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filter an indicated flow to derive an intermediate filtered indicated flow;
derive a weighted first derivative of said filtered indicated flow; and
derive a filtered indicated flow from a sum of said intermediate filtered indicated flow and said weighted first derivative of said intermediate filtered indicated flow;
wherein said intermediate filtered indicated flow is derived using running average.
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30. A system for filtering an indicated flow comprising a flow device operable to:
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filter an indicated flow to derive an intermediate filtered indicated flow;
derive a weighted first derivative of said filtered indicated flow; and
derive a filtered indicated flow from a sum of said intermediate filtered indicated flow and said weighted first derivative of said intermediate filtered indicated flow;
wherein said intermediate filtered indicated flow is derived using IIR.
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31. A system for filtering an indicated flow comprising a flow device operable to:
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filter an indicated flow to derive an intermediate filtered indicated flow;
derive a weighted first derivative of said filtered indicated flow; and
derive a filtered indicated flow from a sum of said intermediate filtered indicated flow and said weighted first derivative of said intermediate filtered indicated flow;
wherein said intermediate filtered indicated flow is derived using FIR.
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32. A system for filtering an indicated flow comprising a flow device operable to:
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filter an indicated flow to derive an intermediate filtered indicated flow;
derive a weighted first derivative of said filtered indicated flow; and
derive an indicated flow from said sum of said intermediate filtered indicated flow and said weighted first derivative of said intermediate filtered indicated flow.
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Specification