Selective electroless-plated copper metallization
First Claim
1. An integrated circuit, comprising:
- at least one semiconductor device formed in a substrate;
a first number of seed layers including a thin film of Palladium (Pd) or Copper formed on a number of portions of the at least one semiconductor device;
a number of copper vias formed above and contacting the first number of seed layers;
a second number of seed layers including a thin film of Palladium (Pd) or Copper formed on the number of copper vias; and
a number of conductor metal lines formed above and contacting second number of seed layers.
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Abstract
Structures and methods are provided which include a selective electroless copper metallization. The present invention includes a novel methodology for forming copper vias on a substrate, including depositing a thin film seed layer of Palladium (Pd) or Copper (Cu) on a substrate to a thickness of less than 15 nanometers (nm). A number of via holes is defined above the seed layer. A layer of copper is deposited over the seed layer using electroless plating to fill the via holes to a top surface of the patterned photoresist layer. The method can be repeated any number of times, forming second, third and fourth layers of copper. The photoresist layers along with the seed layers in other regions can then be removed, such as by oxygen plasma etching, such that a chemical mechanical planarization process is avoided.
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Citations
34 Claims
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1. An integrated circuit, comprising:
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at least one semiconductor device formed in a substrate;
a first number of seed layers including a thin film of Palladium (Pd) or Copper formed on a number of portions of the at least one semiconductor device;
a number of copper vias formed above and contacting the first number of seed layers;
a second number of seed layers including a thin film of Palladium (Pd) or Copper formed on the number of copper vias; and
a number of conductor metal lines formed above and contacting second number of seed layers. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An integrated circuit, comprising:
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a substrate including at least one transistor;
a first number of seed layers including a thin film of Palladium (Pd) or Copper having a thickness of less than 15 nanometers (nm), formed on a source and a drain region of the at least one transistor;
a number of copper vias formed above and contacting the first number of seed layers;
a second number of seed layers including a thin film of Palladium (Pd) or Copper formed on the number of copper vias; and
a number of copper metal lines formed above and contacting the number of second number of seed layers. - View Dependent Claims (8, 9, 10)
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11. An integrated circuit, comprising:
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at least one semiconductor device formed in a substrate;
a first number of seed layers including a thin film of Palladium (Pd) or Copper, having a discontinuous island structure which has a thickness in the range of 3 to 10 nanometers, formed on a number of portions of the at least one semiconductor device;
a number of copper vias formed above and contacting the first number of seed layers;
a second number of seed layers including a thin film of Palladium (Pd) or Copper formed on the number of copper vias;
a number of copper metal lines formed above and contacting the number of second number of seed layers; and
a thin diffusion barrier, having a thickness of less than 8.0 nanometers, covering the number of copper vias, the number of copper metal lines, and the first and the second number of seed layers. - View Dependent Claims (12, 13, 14)
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15. A multilayer copper wiring structure, comprising:
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at least one semiconductor device formed in a substrate;
a first number of seed layers including a thin film of Palladium (Pd) or Copper formed on a number of portions of the at least one semiconductor device;
a first level of copper vias formed above and contacting the first number of seed layers;
a second number of seed layers including a thin film of Palladium (Pd) or Copper formed on the first level of copper vias;
a first level of copper metal lines formed above and contacting second number of seed layers;
a third number of seed layers including a thin film of Palladium (Pd) or Copper formed on the first level of copper metal lines;
a second level of copper vias formed above and contacting the third number of seed layers;
a fourth number of seed layers including a thin film of Palladium (Pd) or Copper formed on the second level of copper vias; and
a second level of copper metal lines formed above and contacting fourth number of seed layers. - View Dependent Claims (16, 17, 18)
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19. A multilayer copper wiring structure, comprising:
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a substrate including at least one transistor;
a first number of seed layers including a thin film of Palladium (Pd) or Copper, having a thickness of less than 15 nanometers (nm), formed on a source and a drain region of the at least one transistor;
a first level of copper vias formed above and contacting the first number of seed layers;
a second number of seed layers including a thin film of Palladium (Pd) or Copper, having a thickness of less than 15 nanometers (nm), formed on the first level of copper vias;
a first level of copper metal lines formed above and contacting second number of seed layers;
a third number of seed layers including a thin film of Palladium (Pd) or Copper, having a thickness of less than 15 nanometers (nm), formed on the first level of copper metal lines;
a second level of copper vias formed above and contacting the third number of seed layers;
a fourth number of seed layers including a thin film of Palladium (Pd) or Copper, having a thickness of less than 15 nanometers (nm), formed on the second level of copper vias;
a second level of copper metal lines formed above and contacting fourth number of seed layers; and
a thin diffusion barrier, having a thickness of less than 8.0 nanometers, covering the first and the second level of copper vias, the first and the second level of copper metal lines, and the first, second, third, and fourth number of seed layers. - View Dependent Claims (20, 21, 22)
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23. An integrated circuit, comprising:
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a semiconductor substrate having a top surface including at least one transistor structure, and a patterned insulator layer having a predetermined vertical thickness overlaying the at least one transistor having openings to access selected portions of the at least one transistor;
a first seed material forming a discontinuous layer covering the patterned insulator layer and discontinuously covering the selected portions of the at least one transistor;
a first level of conductive material covering a selected portion of the first seed layer including at least a portion of the first level of conductive material filling the openings in the patterned insulator layer, the first level of conductive material extending above the predetermined vertical thickness of the patterned insulator layer;
a second seed material forming a discontinuous layer covering at least a top surface of the first level of conductive material;
a second level of conductive material covering at least a portion of the top surface of the first level of conductive material, and not contacting any portion of the patterned insulator layer;
a third seed material forming a discontinuous layer covering at least a top surface of the second level of conductive material;
a third level of conductive material covering at least a portion of the top surface of the second level of conductive material, and not contacting any portion of the patterned insulator layer or the first conductive layer;
a fourth seed material forming a discontinuous layer covering at least a top surface of the third level of conductive material; and
a fourth level of conductive material covering at least a portion of the top surface of the third level of conductive material, and not contacting any portion of the patterned insulator layer, the first conductive layer, or the second conductive layer. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification