Piezoelectric resonator, filter and electronic component using the same
First Claim
1. A piezoelectric resonator comprising:
- a first electrode film formed on a substrate;
a piezoelectric film formed on the first electrode film;
a second electrode film formed on the piezoelectric film and obtaining, in collaboration with the first electrode film, a signal having a predetermined resonance frequency by a propagation of a bulk acoustic wave inside the piezoelectric film; and
an acoustic multilayer reflective film including a first acoustic film having a predetermined acoustic impedance and a second acoustic film having an acoustic impedance higher than the first acoustic film, and reflecting the bulk acoustic wave, the first acoustic film and the second acoustic film being alternately stacked on the second electrode film, and the first acoustic film being in contact with the second electrode film.
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Accused Products
Abstract
A piezoelectric resonator includes; a lower electrode 24 formed on a substrate 11; a piezoelectric film 23 formed on the lower electrode 24; an upper electrode 25 formed on the piezoelectric film 23 and obtaining, in collaboration with the lower electrode 24, a signal having a predetermined resonance frequency by a propagation of a bulk acoustic wave inside the piezoelectric film 23; and an acoustic multilayer reflective film 28 including an SiO2 film 28a having a predetermined acoustic impedance and an AIN film 28b having an acoustic impedance higher than the SiO2 film 28a, and reflecting the bulk acoustic wave, the SiO2 film 28a and the AIN film 28b being alternately stacked on the upper electrode 25, and the SiO2 film 28a being in contact with the upper electrode 25.
43 Citations
14 Claims
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1. A piezoelectric resonator comprising:
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a first electrode film formed on a substrate;
a piezoelectric film formed on the first electrode film;
a second electrode film formed on the piezoelectric film and obtaining, in collaboration with the first electrode film, a signal having a predetermined resonance frequency by a propagation of a bulk acoustic wave inside the piezoelectric film; and
an acoustic multilayer reflective film including a first acoustic film having a predetermined acoustic impedance and a second acoustic film having an acoustic impedance higher than the first acoustic film, and reflecting the bulk acoustic wave, the first acoustic film and the second acoustic film being alternately stacked on the second electrode film, and the first acoustic film being in contact with the second electrode film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification