Apparatus and method for calibrating a semiconductor test system
First Claim
1. An apparatus for calibrating a semiconductor component test system, comprising:
- a first connection, at which a corresponding calibration signal can be input;
a second connection at which the calibration signal can be emitted; and
a third connection at which the calibration signal can be emitted, wherein the first connection which is at least one of connected and connectable via a corresponding line to a first switching apparatus, which is at least one of connected and connectable to the second connection, and to a second switching apparatus, which is at least one of connected and connectable to the third connection.
4 Assignments
0 Petitions
Accused Products
Abstract
A process and device for calibrating a semiconductor component test system includes a first connection, at which a corresponding signal, in particular a calibration signal can be input, and a second and third connection, at which the signal, in particular a calibration signal, can be emitted. The first connection is and/or can be connected via a corresponding line to a first switching apparatus, which is and/or can be connected to the second connection. A second switching apparatus is and/or can be connected to the third connection. Advantageously, the signal is then transferred to the second connection, and barred from the third connection by the first switching apparatus being closed and the second switching apparatus being opened.
-
Citations
11 Claims
-
1. An apparatus for calibrating a semiconductor component test system, comprising:
-
a first connection, at which a corresponding calibration signal can be input;
a second connection at which the calibration signal can be emitted; and
a third connection at which the calibration signal can be emitted, wherein the first connection which is at least one of connected and connectable via a corresponding line to a first switching apparatus, which is at least one of connected and connectable to the second connection, and to a second switching apparatus, which is at least one of connected and connectable to the third connection. - View Dependent Claims (2, 3, 4)
-
-
5. A system comprising:
-
a first connection, at which a corresponding calibration signal can be input;
a second connection at which the calibration signal can be emitted;
a third connection at which the calibration signal can be emitted, wherein the first connection which is at least one of connected and connectable via a corresponding line to a first switching apparatus, which is at least one of connected and connectable to the second connection, and to a second switching apparatus, which is at least one of connected and connectable to the third connection; and
a semiconductor component test apparatus which is connected to the first connection. - View Dependent Claims (6, 7)
-
-
8. A system comprising:
-
a first connection, at which a corresponding calibration signal can be input;
a second connection at which the calibration signal can be emitted;
a third connection at which the calibration signal can be emitted, wherein the first connection which is at least one of connected and connectable via a corresponding line to a first switching apparatus, which is at least one of connected and connectable to the second connection, and to a second switching apparatus, which is at least one of connected and connectable to the third connection; and
a calibration apparatus connected to the first connection for calibrating a semiconductor component test apparatus. - View Dependent Claims (9, 10)
-
-
11. A method for calibrating a semiconductor component test system by using an apparatus, comprising:
-
inputting a calibration signal at a first connection of the apparatus;
transferring the calibration signal to a second connection of the apparatus; and
blocking the signal from a third connection of the apparatus by closing a first switching apparatus which is at least one of connected and connectable to the first connection, which is at least one of connected and connectable to the second connection, and opening a second switching apparatus which is at least one of connected and connectable to the first connection, which is at least one of connected and connectable to the third connection.
-
Specification