Test signal distribution system for IC tester
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Abstract
A probe board provides signal paths between an integrated circuit (IC) tester and probes accessing terminals on the surfaces of ICs formed on a semiconductor wafer for receiving test signals form the IC tester. A branching signal path within the probe board distributes a test signal produced by one channel of the IC tester to several probes. Resistors within the branching signal path resistively isolate the probes from one another so that a fault occurring at any one IC terminal will not affect the logic state of the test signal arriving at any other IC terminal. The isolation resistors are sized relative to signal path characteristic impedances so as to substantially minimize test signal reflections at the branch points.
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Citations
40 Claims
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1-32. -32:
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33. :
- A probe substrate comprising;
a substrate;
a plurality of electrically conductive terminals disposed on a first side of said substrate;
a plurality of electrically conductive probes disposed on a second side of said substrate and disposed to correspond to terminals of an electrical device to be tested, wherein said first side is opposite said second side;
a plurality of electrically conductive paths electrically connecting ones of said terminals with ones of said probes; and
a plurality of resistors disposed on said substrate, ones of said resistors electrically connected to ones of said conductive paths. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40)
- A probe substrate comprising;
Specification