FLEXIBLE VIBRATORY MICRO-ELECTROMECHANICAL DEVICE
First Claim
1. A sensor element for a sensor device, the sensor element comprising:
- a substrate;
a pair of proof masses that are attached to the substrate at fixed anchor points, the pair of proof masses suspended above the substrate; and
a set of drive beams positioned between the proof masses and the anchor points, the drive beams having a first body portion that includes a first flexible spring member that extends along a first direction and a second body portion that includes a flexible spring member that extends along a second direction, the second direction being perpendicular to the first direction, the first and second flexible spring members being configured such that a drive frequency and a sense frequency of the proof masses are substantially aligned.
2 Assignments
0 Petitions
Accused Products
Abstract
There is a sensor element (24) for an electronic sensor device (20). The sensor element (24) may have a substrate (43), a pair of proof masses (34a, 34b), a set of drive beams (44), and at least one base beam (46). The pair of proof masses (34a, 34b) are suspended above the substrate (43) and attached to the substrate (43) at fixed anchor points (50). The set of drive beams (44) are positioned between the proof masses (34a, 34b) and the anchor points (50). Each drive beam (44) has a first longitudinal body portion (62) that extends in a first direction and a first flexible spring member (64) that extends along a second direction. The base beam (46) interconnects the set of drive beams (44) and has a second longitudinal body portion (72) and a second flexible spring member (74). The second longitudinal body portion (72) extends along the second direction and the second flexible spring member (74) extends along the first direction. The first and second flexible spring members (64, 74) may be serpentine in shape, such as folded beam-columns or wrinkle springs.
30 Citations
21 Claims
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1. A sensor element for a sensor device, the sensor element comprising:
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a substrate;
a pair of proof masses that are attached to the substrate at fixed anchor points, the pair of proof masses suspended above the substrate; and
a set of drive beams positioned between the proof masses and the anchor points, the drive beams having a first body portion that includes a first flexible spring member that extends along a first direction and a second body portion that includes a flexible spring member that extends along a second direction, the second direction being perpendicular to the first direction, the first and second flexible spring members being configured such that a drive frequency and a sense frequency of the proof masses are substantially aligned. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A sensor element for a sensor device, the sensor element comprising:
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a substrate;
a pair of proof masses that are attached to the substrate at fixed anchor points, the pair of proof masses suspended above the substrate; and
a set of drive beams positioned between the proof masses and the anchor points, each drive beam having a first body portion that extends along a first direction in a plane and a first flexible spring member therein and a second body portion that includes a flexible spring member that extends along a second direction, the second direction in the plane being perpendicular to the first direction, the first and second flexible spring members being configured such that a drive frequency of the proof masses in the first direction of the lane and a sense frequency of the proof masses out of the plane are substantially aligned and not aligned with at least one vibrational frequency that is in the second direction in the plane. - View Dependent Claims (9, 11, 12, 13, 14)
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10. (cancel).
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15. An electronic sensor comprising:
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a digital processing unit; and
a sensor element, the sensor element comprising;
a substrate;
a pair of proof masses that are attached to the substrate at fixed anchor points, the pair of proof masses suspended above the substrate;
a set of drive beams positioned between the proof masses and the anchor points, each drive beam having a first longitudinal body portion that extends along a first direction in a plane and a first flexible spring member therein and a second body portion that includes a flexible spring member that extends along a second direction in the plane, the second direction being perpendicular to the first direction, the first and second flexible spring members being configured such that a drive frequency of the proof masses in the first direction of the plane and a sense frequency of the proof masses out of the plane are substantially aligned and not aligned with at least one vibrational frequency that is in the second direction in the plane; and
at least one base beam that interconnects the set of drive beams, the base beam having a second longitudinal body portion that extends along the second direction and a second flexible spring member that extends along the first direction. - View Dependent Claims (16, 18, 19, 20, 21)
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17. (cancel).
Specification