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Spatial light modulator, lithographic apparatus and device manufacturing method

  • US 20050024613A1
  • Filed: 06/25/2004
  • Published: 02/03/2005
  • Est. Priority Date: 06/30/2003
  • Status: Active Grant
First Claim
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1. A spatial light modulator, comprising:

  • an array of pixels disposed on a support, each pixel in the array of pixels having a light modulating element that modulates an incident radiation beam; and

    a control circuit that positions the light modulating elements according to a desired pattern, the control circuit coupled to an opposite side of said support than said light modulating elements, wherein said control circuit comprises at least one of;

    a digital-to-analog converter, an analog-to-digital converter, an optical fiber input, and a plurality of processors.

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