VCSEL and VCSEL array having integrated microlenses for use in a semiconductor laser pumped solid state laser system
First Claim
1. A structure within a vertical cavity surface emitting laser (VCSEL) device, the structure comprising:
- a substrate having a microlens formed therein;
a first mirror region formed on said substrate;
an active layer formed on said first mirror region;
a second mirror region formed on said active layer; and
a heat sink formed on said second mirror region.
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Accused Products
Abstract
A vertical cavity surface emitting laser (VCSEL) device with improved power and beam characteristics. The VCSEL device contains one VCSEL or an array of VCSELs. Each VCSEL has a corresponding integrated microlens, and a heat sink is attached to the device side of the VCSEL device. The heat sink allows improved heat dissipation, and therefore provides improved power characteristics of the VCSEL device output laser beam. The microlens or microlens array allows easier and more compact focussing of the VCSEL device output laser beam. The VCSEL device can be used in a variety of optical systems, and its improved power and focusing characteristics provide a compact, low power, low cost laser system.
70 Citations
13 Claims
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1. A structure within a vertical cavity surface emitting laser (VCSEL) device, the structure comprising:
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a substrate having a microlens formed therein;
a first mirror region formed on said substrate;
an active layer formed on said first mirror region;
a second mirror region formed on said active layer; and
a heat sink formed on said second mirror region. - View Dependent Claims (2, 3, 4, 5, 6)
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7. In a VCSEL device array having a plurality of VCSEL devices arranged on a substrate, each VCSEL device outputting an individual output laser beam so that the VCSEL device array outputs a composite output laser beam composed of the individual output laser beams, a structure within each member of a subset of the plurality of the VCSEL devices comprising:
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a microlens formed within said substrate;
a first mirror region, formed on said substrate;
an active layer formed on said first mirror region;
a second mirror region formed on said active layer; and
a heat sink formed on said second mirror region. - View Dependent Claims (9, 10, 11, 12)
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8. A structure within a VCSEL device array in accordance with clam 7, further comprising:
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a contact layer on the second mirror region, a metal layer on a surface of the heat sink facing the second mirror region; and
a bonding material which bonds the metal layer and the contact layer.
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13-29. -29. (Cancel).
Specification