Capacitive position sensor and sensing methodology
First Claim
1. A sensor for determining the position of a reciprocating member, said sensor comprising:
- a fixed electrode support structure comprising a fixed electrode and a guard electrode, said fixed electrode being electrically isolated from said guard electrode; and
a movable electrode, said movable electrode positioned to move in direct proportion to the movement of said reciprocating member;
wherein said fixed electrode and said movable electrode form a capacitive structure, said capacitive structure having a variable capacitance which is directly proportional to the instantaneous position of said reciprocating member.
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Accused Products
Abstract
A simple and robust variable coaxial capacitive sensor and detection method for monitoring the position of a rapidly reciprocating member such as a piston or displacer in a free piston Stirling engine. The coaxial capacitor of the present invention in a preferred embodiment thereof is configured to modulate capacitive electrode area rather than inter-electrode spacing and as a result a highly linear transfer function can be achieved. Also disclosed are detection methods which derive and process signals in connection with applications which have small sensor capacitance variations while suppressing stray capacitance error.
40 Citations
44 Claims
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1. A sensor for determining the position of a reciprocating member, said sensor comprising:
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a fixed electrode support structure comprising a fixed electrode and a guard electrode, said fixed electrode being electrically isolated from said guard electrode; and
a movable electrode, said movable electrode positioned to move in direct proportion to the movement of said reciprocating member;
wherein said fixed electrode and said movable electrode form a capacitive structure, said capacitive structure having a variable capacitance which is directly proportional to the instantaneous position of said reciprocating member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A free piston Stirling engine including a power piston, said free piston Stirling engine capable of determining the instantaneous position of said power piston via a capacitive position sensor, said capacitive position sensor comprising:
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a fixed electrode support structure comprising a fixed electrode and a guard electrode, said fixed electrode being electrically isolated from said guard electrode; and
a movable electrode, said movable electrode positioned to move in direct proportion to the movement of said power piston;
wherein said fixed electrode and said movable electrode form a capacitive structure, said capacitive structure having a variable capacitance which is directly proportional to the instantaneous position of said power piston. - View Dependent Claims (16)
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17. A capacitive position sensor comprising:
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a fixed electrode support structure comprising a fixed electrode and a guard electrode, said fixed electrode being electrically isolated from said guard electrode; and
a movable electrode, said movable electrode positioned to move in direct proportion to the movement of a reciprocating member;
wherein said guard electrode is driven at a potential which is the same as that of said fixed electrode. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A method for determining the position of a reciprocating member, said method comprising the steps of:
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(i) providing a fixed electrode and a guard electrode, said fixed electrode being electrically isolated from said guard electrode;
(ii) providing a movable electrode, said movable electrode positioned to move in direct proportion to the movement of said reciprocating member; and
(iii) periodically measuring the capacitance between said fixed electrode and said movable electrode in order to determine the instantaneous position of said reciprocating member. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. A method for controlling the movement of a reciprocating member, said method comprising the steps of:
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(i) providing a fixed electrode and a guard electrode, said fixed electrode being electrically isolated from said guard electrode;
(ii) providing a movable electrode, said movable electrode positioned to move in direct proportion to the movement of said reciprocating member;
(iii) periodically measuring the capacitance between said fixed electrode and said movable electrode in order to determine the instantaneous position of said reciprocating member; and
(iv) controlling the movement of said reciprocating member based upon said determined instantaneous position of said reciprocating member. - View Dependent Claims (41, 42, 43, 44)
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Specification