Interface unit, lithographic projection apparatus comprising such an interface unit and a device manufacturing method
First Claim
1. An interface unit comprising:
- a first object transfer path to transfer objects between a track configured to process objects and a lithographic exposure unit configured to expose objects, and a second object transfer path that extends through a closable transfer opening to an external space, the second object transfer path configured to facilitate the transfer of objects between the external space and the lithographic exposure unit.
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Accused Products
Abstract
An interface unit for transferring objects, such as substrates, is presented. The interface unit includes a first object transfer path to transfer objects between a track configured to process objects and a lithographic exposure unit configured to expose objects, wherein the interface unit is also provided with a second object transfer path extending through a closable transfer opening to an external space to transfer objects between the external space and the lithographic exposure unit. Furthermore, the invention relates to a lithographic apparatus provided with a lithographic exposure unit and an interface unit according to the invention.
188 Citations
23 Claims
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1. An interface unit comprising:
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a first object transfer path to transfer objects between a track configured to process objects and a lithographic exposure unit configured to expose objects, and a second object transfer path that extends through a closable transfer opening to an external space, the second object transfer path configured to facilitate the transfer of objects between the external space and the lithographic exposure unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A lithographic apparatus comprising:
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(a) a lithographic exposure unit including;
a radiation system configured to provide a beam of radiation;
a support structure configured to support a patterning device that imparts a desired pattern to the beam of radiation;
a substrate holder configured to hold a substrate; and
a projection system configured to project the patterned beam of radiation onto a target portion of the substrate, and (b) an interface unit coupled to the lithographic exposure unit, the interface unit including;
a first object transfer path to transfer the substrate between a track configured to process substrates and the lithographic exposure unit configured to expose substrates, and a second object transfer path that extends through a closable transfer opening to an external space, the second object transfer path configured to facilitate the transfer of the substrate between the external space and the lithographic exposure unit.
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14. A device manufacturing method comprising:
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transferring a substrate to an exposure unit or a track unit via separate paths of an interface unit coupled to said exposure unit and said track unit;
providing a beam of radiation using a radiation system;
patterning the beam of radiation with a pattern in its cross-section; and
projecting the patterned beam of radiation onto a target portion of a layer of radiation-sensitive material on said substrate. - View Dependent Claims (15, 16)
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17. A lithographic system comprising:
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a lithographic exposure unit configured to expose a substrate;
a track unit comprising a plurality of processing stations configured to process said substrate; and
an interface unit operatively associated with said lithographic exposure unit and said track unit, said interface unit being configured to transfer said substrate between said lithographic exposure unit and said track unit, said interface unit being further capable of receiving a substrate from a structure other than said lithographic exposure unit or said track unit and further capable of transferring said substrate from said other structure to said lithographic exposure unit and/or said track unit. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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Specification