Processing apparatus for object to be processed and processing method using same

• US 20050034674A1
• Filed: 09/15/2004
• Published: 02/17/2005
• Est. Priority Date: 03/29/2002
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Ono, Katsuhiko
• Application Number:
  US10/940,779
• Publication Number:
  US 20050034674A1
• Time in Patent Office: Days
• US Class Current: 118/728
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks

Abstract

A processing apparatus includes a processing vessel; a susceptor installed in the processing vessel and having an electrostatic chuck for attracting and holding an object to be processed; lifter pins, elevatably installed with respect to the susceptor, for separating the object from the susceptor; and a jump-up detection device for detecting whether or not the object jumps up from the susceptor when the object is lifted up to be separated therefrom by the lifter pins, wherein the jump-up detection device has a discharge detection unit for detecting at least one of a discharge current and a discharge voltage generated between the object and the susceptor when the object is separated from the susceptor; and a judging unit for judging whether or not the object jumps up based on a detection result of the discharge detection unit.

Claims

1. A processing apparatus comprising:

a processing vessel;

a susceptor installed in the processing vessel and having an electrostatic chuck for attracting and holding an object to be processed;

lifter pins, elevatably installed with respect to the susceptor, for separating the object from the susceptor; and

a jump-up detection device for detecting whether or not the object jumps up from the susceptor when the object is lifted up to be separated therefrom by the lifter pins,

wherein the jump-up detection device includes;

a discharge detection unit for detecting at least one of a discharge current and a discharge voltage generated between the object and the susceptor when the object is separated from the susceptor; and

a judging unit for judging whether or not the object jumps up based on a detection result of the discharge detection unit.

2. The processing apparatus of claim 1, further comprising a display unit for displaying a judging result of the judging section.

3. The processing apparatus of claim 1, wherein a showerhead serving as an upper electrode and for discharging a processing gas into the processing vessel is installed at a ceiling portion of the processing vessel and the discharge detection unit is connected to the showerhead to thereby detect at least one of the discharge current and the discharge voltage.

4. The processing apparatus of claim 1, wherein an upper electrode and a lower electrode to which a high frequency voltage for generating a plasma is applied are installed in the processing vessel, and the discharge detection unit is connected to the upper electrode to thereby detect at least one of the discharge current and the discharge voltage.

5. The processing apparatus of claim 1, wherein the discharge detection unit is connected to the processing vessel to thereby detect at least one of the discharge current and the discharge voltage.

6. The processing apparatus of claim 1, wherein the judging unit has a threshold value.

7. The processing apparatus of claim 6, wherein the threshold value ranges from about 0 to about −

1000 V when the discharge voltage is detected.

8. The processing apparatus of claim 6, wherein the threshold value ranges from 0 to about 10 mA when the discharge current is detected.

9. The processing apparatus of claim 1, wherein the susceptor has an electrically conductive base connected to a high frequency power supply and the conductive base is switchably connected to the discharge detection unit.

10. The processing apparatus of claim 1, wherein the electrostatic chuck of the susceptor is connected to a high voltage power supply, and the electrostatic chuck is switchably connected to the discharge detection unit.

11. The processing apparatus of claim 1, wherein the processing apparatus is a plasma processing apparatus.

12. The processing apparatus of claim 1, wherein the processing apparatus is an exposure apparatus.

13. A processing method for use with a processing apparatus having a processing vessel, a susceptor installed in the processing vessel and including an electrostatic chuck, and lifter pins, the processing method comprising the steps of:

(a) attracting and holding an object to be processed on the susceptor in the processing vessel by a Coulomb force of the electrostatic chuck;

(b) separating the object from the susceptor by lifting it up by the lifter pins after applying a charge neutralization voltage to the electrostatic chuck; and

(c) detecting whether or not the object jumps up from the susceptor when the object is lifted up by the lifter pins,

wherein the detecting step (c) further includes the steps of;

(c1) detecting at least one of a discharge current and a discharge voltage generated between the object and the susceptor when the object is separated from the susceptor; and

(c2) judging whether or not the object jumps up based on a detection result of the step (c1).

14. The processing method of claim 13, wherein a jump-up of the object is detected when the object is separated from the susceptor after performing a plasma processing on the object.