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Processing apparatus for object to be processed and processing method using same

  • US 20050034674A1
  • Filed: 09/15/2004
  • Published: 02/17/2005
  • Est. Priority Date: 03/29/2002
  • Status: Abandoned Application
First Claim
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1. A processing apparatus comprising:

  • a processing vessel;

    a susceptor installed in the processing vessel and having an electrostatic chuck for attracting and holding an object to be processed;

    lifter pins, elevatably installed with respect to the susceptor, for separating the object from the susceptor; and

    a jump-up detection device for detecting whether or not the object jumps up from the susceptor when the object is lifted up to be separated therefrom by the lifter pins, wherein the jump-up detection device includes;

    a discharge detection unit for detecting at least one of a discharge current and a discharge voltage generated between the object and the susceptor when the object is separated from the susceptor; and

    a judging unit for judging whether or not the object jumps up based on a detection result of the discharge detection unit.

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