Reducing oxides on a switching fluid in a fluid-based switch

• US 20050034962A1
• Filed: 04/14/2003
• Published: 02/17/2005
• Est. Priority Date: 04/14/2003
• Status: Active Grant

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn, Lindsey, John Ralph
• Granted Patent: US 6,924,443 B2
• Time in Patent Office: Days
• US Class Current: 200/182
• CPC Class Codes: G02B 6/353 the optical element being a shutter, baffle, beam dump or opaque element absorbers on light guide termination G02B6/243
• CPC Class Codes: G02B 6/3538 based on displacement or deformation of a liquid controlling the intensity of light by displacement or deformation of a fluid in general G02B26/004; fluid-filled lens of variable focal length G02B3/14
• CPC Class Codes: G02B 6/3552 1x1 switch, e.g. on/off switch
• CPC Class Codes: G02B 6/3576 Temperature or heat actuation thermal forces controlling reflecting elements in general G02B26/0866; thermo-optic devices G02F1/0147
• CPC Class Codes: G02B 6/3578 Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: G02B 6/3594 Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
• CPC Class Codes: H01H 1/66 Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
• CPC Class Codes: H01H 11/02 for mercury switches
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 29/04 Contacts; Containers for liquid contacts
• CPC Class Codes: H01H 29/28 with level of surface of contact liquid displaced by fluid pressure

Abstract

Fluid-based switch and methods for reducing oxides on switching fluid are disclosed. In one method, oxides are reduced by depositing a switching fluid on a first substrate, mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states, and creating a gas in the cavity holding the switching fluid, the gas to react with at least one of oxygen in the cavity and oxides on the switching fluid.

Claims

1. A method, comprising:

depositing a switching fluid on a first substrate;

mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states; and

creating a gas in the cavity holding the switching fluid, the gas to react with at least one of oxygen in the cavity and oxides on the switching fluid.

2. The method of claim 1, further comprising:

before mating the substrates, depositing a catalyst on one of the substrates;

depositing a carbon layer on the catalyst; and

after mating the substrates, exciting the catalyst to create the gas.

3. The method of claim 2, wherein exciting the catalyst comprises heating the catalyst.

4. The method of claim 2, wherein creating a gas comprises applying light to the catalyst.

5. The method of claim 2, wherein the catalyst comprises at least one of a platinum and a palladium catalyst.

6. The method of claim 1, further comprising:

before mating the substrates, depositing a resistance heater on one of the substrates;

depositing a carbon layer on the resistance heater; and

after mating the substrates, activating the heater.

7. The switch of claim 1, wherein the gas comprises carbon monoxide.

8. The switch of claim 1, wherein the switching fluid comprises mercury.

9. The switch of claim 1, wherein the switching fluid comprises a gallium alloy.

10. A switch comprising:

first and second mated substrates defining therebetween at least portions of a number of cavities;

a plurality of electrodes exposed within one or more of the cavities;

a switching fluid, held within a first one of the cavities, that serves to open and close at least a pair of the plurality of electrodes in response to forces that are applied to the switching fluid;

a gas held within the first cavity, the gas to react with at least one of oxygen in the cavity and oxides on the switching fluid;

an actuating fluid, held within one or more of the cavities, that applies the forces to said switching fluid.

11. The switch of claim 10, further comprising a mechanism, presenting within one or more of the cavities, to create the gas.

12. The switch of claim 11, wherein the mechanism comprises:

a catalyst deposited on one of the substrates; and

carbon deposited on the catalyst.

13. The switch of claim 12, wherein the catalyst comprises at least one of a platinum and a palladium catalyst.

14. The switch of claim 11, wherein the mechanism comprises:

a heater attached to one of the substrates; and

carbon deposited on the heater.

15. The switch of claim 10, wherein the gas comprises carbon monoxide.

16. The switch of claim 10, wherein the gas comprises hydrogen.

17. A switch comprising:

first and second mated substrates defining therebetween at least portions of a number of cavities;

a plurality of wettable pads exposed within one or more of the cavities;

a switching fluid, wettable to said pads and held within one or more of the cavities, that serves to open and block light paths through one or more of the cavities in response to forces that are applied to the switching fluid;

a gas held within the first cavity, the gas to react with at least one of oxygen in the cavity and oxides on the switching fluid; and

an actuating fluid, held within one or more of the cavities, that applies the forces to said switching fluid.

18. The switch of claim 17, further comprising a mechanism, presenting within one or more of the cavities, to create the gas.

19. The switch of claim 18, wherein the mechanism comprises:

a catalyst deposited on one of the substrates; and

carbon deposited on the catalyst.

20. The switch of claim 19, wherein the catalyst comprises at least one of a platinum and a palladium catalyst.

21. The switch of claim 18, wherein the mechanism comprises:

a heater attached to one of the substrates; and

carbon layer deposited on the resistance heater.

22. The switch of claim 17 wherein the gas comprises carbon monoxide.

23. The switch of claim 17, wherein the gas comprises hydrogen.

24. A method, comprising:

depositing a switching fluid on a first substrate;

mating the first substrate to a second substrate, the first substrate and the second substrate defining therebetween a cavity holding the switching fluid, the cavity being sized to allow movement of the switching fluid between first and second states; and

injecting a gas into the cavity, the gas to react with at least one of oxygen in the cavity and oxides on the switching fluid.

25. The method of claim 24, wherein the gas comprises carbon monoxide.

26. The method of claim 24, wherein the gas comprises hydrogen.

27. The method of claim 24, wherein the switching fluid comprises mercury.

28. The method of claim 24, wherein the switching fluid comprises a gallium alloy.

29. The method of claim 24, wherein the gas is injected during mating the substrates.

30. The method of claim 24, wherein the gas is injected after mating the substrates.