Probe card assembly
First Claim
1. Probe card insert for a probe card assembly, comprising:
- a silicon substrate having a first plurality of terminals;
a plurality of probe elements mounted to the first plurality of terminals a plurality of connections between selected ones of the first plurality of terminals to selected ones of a plurality of probe card contacts, and resilient support means for positioning the silicon substrate away from and generally parallel to a probe card.
1 Assignment
0 Petitions
Accused Products
Abstract
In a probe card assembly, a series of probe elements can be arrayed on a silicon space transformer. The silicon space transformer can be fabricated with an array of primary contacts in a very tight pitch, comparable to the pitch of a semiconductor device. One preferred primary contact is a resilient spring contact. Conductive elements in the space transformer are routed to second contacts at a more relaxed pitch. In one preferred embodiment, the second contacts are suitable for directly attaching a ribbon cable, which in turn can be connected to provide selective connection to each primary contact. The silicon space transformer is mounted in a fixture that provides for resilient connection to a wafer or device to be tested. This fixture can be adjusted to planarize the primary contacts with the plane of a support probe card board.
-
Citations
5 Claims
-
1. Probe card insert for a probe card assembly, comprising:
-
a silicon substrate having a first plurality of terminals;
a plurality of probe elements mounted to the first plurality of terminals a plurality of connections between selected ones of the first plurality of terminals to selected ones of a plurality of probe card contacts, and resilient support means for positioning the silicon substrate away from and generally parallel to a probe card. - View Dependent Claims (2, 3, 4, 5)
-
Specification