×

Probe card assembly

  • US 20050035347A1
  • Filed: 07/12/2004
  • Published: 02/17/2005
  • Est. Priority Date: 11/16/1993
  • Status: Active Grant
First Claim
Patent Images

1. Probe card insert for a probe card assembly, comprising:

  • a silicon substrate having a first plurality of terminals;

    a plurality of probe elements mounted to the first plurality of terminals a plurality of connections between selected ones of the first plurality of terminals to selected ones of a plurality of probe card contacts, and resilient support means for positioning the silicon substrate away from and generally parallel to a probe card.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×